polyimide advice

Sharleen Beckwith beckwith at snf.stanford.edu
Wed Sep 11 10:32:08 PDT 2002


Hi All:

I am thinking about using polyimide to protect the front side of SOI 
wafers while doing the following steps on the backside of the wafer:

svgcoat (20um thick using SPR 220-7)
evalign
hand develop
long 90C bake in the oven
sts etch (10 hours or so, on the backside of the wafer)

If anyone had done something similar, could you please e-mail me. I 
would like to talk to you about the pros and cons of this.

Thanks.

Sharleen
-- 

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Knowledge is the basis, for without knowing each other it is difficult
to build trust and to reach a state of genuine unity, without which it
is hard to get peace.

His Holiness Tenzin Gyatso,
The Fourteenth Dalai Lama
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