Big Trench on Cu

Wei Shi shiwei20012002 at
Tue Apr 1 13:06:49 PST 2003


I want to make 2 trenches on copper substrate, the sizes are: 

(1). 100 micron deep and 100 micron wide.

(2). 50 micron deep and 50 micron wide.

Dose anyone have any good solution to it?




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