brief gas shutdown Monday 4/7 0630-0730

Dick Crane rcrane at snf.stanford.edu
Tue Apr 1 15:47:54 PST 2003


Etch, furnace, and RTA users,

There will be a brief shutdown of all process gases (excluding the
freons) and oxygen and hydrogen on Monday, April 7, from 0630 to 0730,
to allow new gas monitor circuits to be connected and tested. This work
supports the Thermco furnace project. I have made reservations on all
affected tools. The work should require a 15 minute interruption.

Sorry for any inconvenience and thanks for your continued support,

Dick




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