LRS-18

Paul Jerabek jerabek at snf.stanford.edu
Tue Apr 15 08:35:30 PDT 2003


 To whom it may concern,
LRS-18 mask writer has been down since Friday 4/11/03 with a serious
problem of stage interferometer. It's randomly quiting during a write
operation.Micronic field service is working to correct the problem.
At this time I have a backlog of about 60 masks.
-Paul




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