Possible brief gas shutdown Monday, 4/21 0630-0900

Dick Crane rcrane at snf.stanford.edu
Thu Apr 17 08:58:11 PDT 2003

Etch, furnace, and RTA users,

There is the possibility of a brief shutdown of all process gases
(excluding the freons) and oxygen and hydrogen on Monday, April 21, from
0630 to 0800, to allow new gas monitor circuits to be connected and
tested. The shutdown may occur only if there is an unanticipated

How does this affect your process? Maintenance staff will be standing by
to restart the gases within minutes of shutdown. Almost all gas lines
have sufficient pressure such that the gas user will not lose gas flow
for 5-45 minutes. The exemptions are the high flow gases such as H2 and
HCl to the EPI. The LP furnaces will be down at this time for the gas
tie-in work. If a shutdown does occur, it, most likely, will pass
unnoticed by the tools.

This work supports the Thermco furnace project.

Sorry for any inconvenience and thanks for your continued support,


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