Metal dep help

Rajesh Gupta rajesh at
Fri Apr 18 10:12:19 PDT 2003


I am having step coverage issues for my metal deposition (Al-Si) over contact openings 0.4um width and height.(vertical side-walls). Resulting in open contacts. 

Does anyone know of an outside source that can do some CVD type of metal deposition on 4inch wafers(Ex. Ti, TiW, or W)?

Any suggestions on how I could resolve this problem, either with SNF equipment or outside vendor?

I will verymuch appreciate your help/suggestions. Thanks in advance.


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