Metal dep help
afflannery at attbi.com
Fri Apr 18 10:57:40 PDT 2003
I had good step coverage results with Al using a heavy DC bias sputter
deposition at Lance Goddard. If you mention me he will remember what he did.
They have to reconfigure a machine to do the dep so the turnaround can take
a week to 10 days based on their current work flow. In order to prevent
surface damage, I had him hold the DC bias until the first 50 nm had been
----- Original Message -----
From: "Rajesh Gupta" <rajesh at t-ram.com>
To: <labmembers at snf.stanford.edu>
Sent: Friday, April 18, 2003 10:12 AM
Subject: Metal dep help
I am having step coverage issues for my metal deposition (Al-Si) over
contact openings 0.4um width and height.(vertical side-walls). Resulting in
Does anyone know of an outside source that can do some CVD type of metal
deposition on 4inch wafers(Ex. Ti, TiW, or W)?
Any suggestions on how I could resolve this problem, either with SNF
equipment or outside vendor?
I will verymuch appreciate your help/suggestions. Thanks in advance.
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