Planarization of the films...

jules83 at stanford.edu jules83 at stanford.edu
Tue Apr 22 10:42:46 PDT 2003


All of you experts out there...

I have an electroplated annealed Gold film, and I was wondering if 
there is a way to planarize the surface. It's rather rough (about 
100nm for a 3um film), and it's critical that we get it as flat as 
possible.

Is there anything out that like electropolishing or something that 
could do that?

Thank you!
--Julia



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