SiN on 5" wafers

[Anthony Flannery]

Quicksil. They process 5" and have a nitride process.

----- Original Message -----
From: "Scott D. Andrews" <sandrew at stanford.edu>
To: <labmembers at snf.stanford.edu>
Sent: Wednesday, April 30, 2003 5:48 PM
Subject: SiN on 5" wafers


> Hello,
>
> Does anyone know where I can purchase 5 inch Si wafers with low-stress SiN
> grown on both sides?
>
> Thanks,
> Scott Andrews
>
>