SOI thickness measurement by Nanospec?

Hatice Altug altug at stanford.edu
Mon Aug 11 15:34:09 PDT 2003


Hi all,

I wonder if anybody currently using nanospec (or ellipsometer if possible)
to measure thin silicon thickness on SOI wafer.
My SOI wafer has 1um oxide and silicon with thickness ranging from
300nm-1500nm. I have used three programs written by labmembers but it could
not measure my chips.

Could you reply me if you know how to measure it?

thank you,

-hatice




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