Spin-on glass question

cshen at briontech.com cshen at briontech.com
Wed Aug 20 10:49:01 PDT 2003


Dear Labmembers,
I wish to fill 1:1 aspect ratio trenches, PECVD SiO2 forms voids. I wish
to use spin-on glass to planarize the features and then do SiO2
deposition.
Can anybody give me suggestions on what kind of SOG to use? I wish to have
no crack, no UV absorption.
Any information will be greatly appreciated.
Chongfei





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