SiO evaporation

Silvia Luescher sluesch at stanford.edu
Thu Aug 28 17:46:41 PDT 2003


Hi All,

I am having problems with the adhesion of thermally evaporated silicon 
monoxide to my substrate (InAs or InAlAs). Has anyone out there some 
suggestions on how to improve the sticking of SiO films?

Thanks,

Silvia




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