question about Moly

smalekos at smalekos at
Thu Dec 11 11:53:47 PST 2003

Hello all,

I am interested in etching into a 100nm moly-coated Si wafer.  The mask is
defined  using scanning probe lithography (PMMA), and I am curious if there is a
good wet-etch technique that will etch into the moly and not the PMMA.  The
Nitric/Hydrofluoric/H2O mixture is a little too nasty for me, and it will rip
right through the PMMA.  If anyone might have an idea (wet or dry etch), without
having to do too many layers, it would be greatly appreciated.

Thank you,

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