Litho up date
mahnaz at snf.stanford.edu
Fri Feb 14 15:48:12 PST 2003
I am very pleased to announce that the Karl Suss1 is up and running. I
have ran quiet few tests and I was able to resolve 1 um line and space
with vacuum recipe with minimal effort ( Post Exposure is a must). The
new chuck has been modified and now there is a drawer between two Karl
suss that extra chucks ad mask holders should be kept there.
Please note that there are no reason to touch the power supply on the
KS1 as the power supply for now only has the 365 nm and the intensity
of the lamp is 15 mv/cm2. The DUV is not installed and the lamp housing
is not here yet.
You are responsible to report any issues and problems with the system
and yellow light it even if the system has been yellow lighted for
Your name all should have been transferred to the KS1 if you are
qualified on KS2 if you can not enable the KS1 send a gentle and kind
email to John Shott.
Please take a good care of all the systems in the lab as I like to
believe all of you have good intention.
Have a happy Valentine's Day
and a holiday
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