looking for a paper

Yahong Yao yy7343 at hotmail.com
Mon Feb 24 20:54:38 PST 2003

Dear labmembers,

I am looking for a paper presented in the Micromachining and 
Microfabrication of 2003 by SPIE.  The conference was in late Jan. and the 
proceedings are not available in library yet.  The paper is titled 
"Micropackaging Technologies for Integrated Microsystems: Applications to 
MEMS and MOEMS" by Professor Khalil Najafi.

If any one has the proceedings, pls let me know.  Thanks a lot.


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