From mtang at snf.stanford.edu Mon Jun 2 12:37:42 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 02 Jun 2003 12:37:42 -0700 Subject: A word from our sponsor... Message-ID: <3EDBA786.19755F6E@snf.stanford.edu> Greetings Labmembers: I'd like to take this opportunity to present a word from our newest commercial sponsor. BioMEMS 2003, Advances in Biological Diagnostics and Medical Applications, will be held June 15-17, in San Jose. This also features pre-conference workshop entitled: "From MEMS to NEMS: Multiscale Technological Miniaturization of Electromechanical Systems." For more information, check out the event website at: http://www.knowledgepress.com/events/11201717.htm The organizers have also been kind enough to donate a free registration, for an interested academic researcher (worth $850). If you are interested, please let me know. Thanks for your attention! Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From kovacs at cis.stanford.edu Mon Jun 2 12:51:00 2003 From: kovacs at cis.stanford.edu (Gregory Kovacs) Date: Mon, 02 Jun 2003 12:51:00 -0700 Subject: A word from our sponsor... In-Reply-To: <3EDBA786.19755F6E@snf.stanford.edu> Message-ID: Mary, With all due respect, this "foundation" is a for-profit. Given that they rake in significant amounts of money from these meetings, I consider this donation helpful (to one person), but mainly advertising. Personally, I would never PAY $850 to attend one of these. Please bear in mind that the scientific quality of these meetings tends to be medium-low (since most talks are promotional at some level), but they are certainly good for networking with corporate types. Best, Greg > Greetings Labmembers: > > I'd like to take this opportunity to present a word from our newest > commercial sponsor. BioMEMS 2003, Advances in Biological Diagnostics > and Medical Applications, will be held June 15-17, in San Jose. This > also features pre-conference workshop entitled: "From MEMS to NEMS: > Multiscale Technological Miniaturization of Electromechanical > Systems." For more information, check out the event website at: > http://www.knowledgepress.com/events/11201717.htm > > The organizers have also been kind enough to donate a free registration, > for an interested academic researcher (worth $850). If you are > interested, please let me know. > > Thanks for your attention! > > Mary > > -- > Mary X. Tang, Ph.D. > National Nanofabrication Users' Network > Stanford Nanofabrication Facility > CIS Room 136, Mail Code 4070 > Stanford, CA 94305 > (650)723-9980 > mtang at snf.stanford.edu > From mtang at snf.stanford.edu Mon Jun 2 14:14:15 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 02 Jun 2003 14:14:15 -0700 Subject: A word from our sponsor... References: Message-ID: <3EDBBE27.14B0331E@snf.stanford.edu> Hello Labmembers -- Greg brings up completely valid points. I would like to explain that SNF does not specifically recommend this conference, but rather, came to an arrangement with the organizers. As you probably realize, our lab is not immune to the economic downturn. This forces us to be a little more creative in garnering resources, and we sometimes make use of in-kind bartering. In this case, the conference organizers are distributing our SNF brochures in exchange for my bit of spam. My apologies if anyone is offended by this -- but please realize that we thought about this and felt that the integrity of our organization would not compromised by judiciously engaging in this type of activity. (And I rather thought with the free registrations that at least some members of our lab community might benefit from the imposition of receiving a little spam...) By the way, I have (as I'm sure as many of you) attended this and similar conferences. This is a commercial, non-refereed event; technical depth will be lacking. If you work in the BioMEMS field, you will likely have seen this all before, and then some. However, if you're looking for an intro or are interested in the commercial possibilities or in networking, then this is actually a pretty good way to do any or all three. Thanks for your attention -- Mary Gregory Kovacs wrote: > Mary, > With all due respect, this "foundation" is a for-profit. Given that they > rake in significant amounts of money from these meetings, I consider this > donation helpful (to one person), but mainly advertising. Personally, I > would never PAY $850 to attend one of these. Please bear in mind that the > scientific quality of these meetings tends to be medium-low (since most > talks are promotional at some level), but they are certainly good for > networking with corporate types. > > Best, > Greg > > > Greetings Labmembers: > > > > I'd like to take this opportunity to present a word from our newest > > commercial sponsor. BioMEMS 2003, Advances in Biological Diagnostics > > and Medical Applications, will be held June 15-17, in San Jose. This > > also features pre-conference workshop entitled: "From MEMS to NEMS: > > Multiscale Technological Miniaturization of Electromechanical > > Systems." For more information, check out the event website at: > > http://www.knowledgepress.com/events/11201717.htm > > > > The organizers have also been kind enough to donate a free registration, > > for an interested academic researcher (worth $850). If you are > > interested, please let me know. > > > > Thanks for your attention! > > > > Mary > > > > -- > > Mary X. Tang, Ph.D. > > National Nanofabrication Users' Network > > Stanford Nanofabrication Facility > > CIS Room 136, Mail Code 4070 > > Stanford, CA 94305 > > (650)723-9980 > > mtang at snf.stanford.edu > > -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From peterman at stanford.edu Tue Jun 3 09:50:52 2003 From: peterman at stanford.edu (Mark Peterman) Date: Tue, 03 Jun 2003 09:50:52 -0700 Subject: Ph.D. Dissertation Defense -- Mark Peterman Message-ID: <3EDCD1EC.9010109@stanford.edu> DEPARTMENT OF APPLIED PHYSICS UNIVERSITY PhD DISSERTATION DEFENSE Speaker: Mark C. Peterman Research Advisor: Professor Harvey Fishman Title: THE ARTIFICIAL SYNAPSE CHIP: FROM PROTEINS TO PROSTHESES Date: June 5, 2003 Time: 4:00 pm Place: Applied Physics Building - Room 200 ABSTRACT Most retinal prostheses use an electric field to stimulate retinal circuitry, yet information transfer in the retina is primarily through neurotransmitters. To address this difference, this thesis describes a proof of concept retinal interface based on localized chemical delivery. This system, the Artificial Synapse Chip, is based on a 5 micron aperture in a silicon nitride membrane overlying a microfluidic channel. The effectiveness of this interface is demonstrated by ejecting bradykinin on cultured excitable cells. Even with manual fluidic control, the relationship between the extent of stimulation and concentration is linear, providing enough control to limit stimulation to individual cells. A neurotransmitter-based prosthesis will require advanced fluidic control. This thesis reports the use of electroosmosis to eject and withdraw fluid from an aperture in a channel wall. This effect is demonstrated experimentally, and numerically, using a finite-element method. Our primary device is a prototype interface with four individually addressable apertures in a 2?2 array. Using this array, we demonstrate stimulation of both PC12 and retinal ganglion cells. This demonstration of localized chemical stimulation of excitable cells illustrates the potential of this technology for retinal prostheses. As a final application of the Artificial Synapse Chip, we consider lipid bilayer membranes and membrane-bound proteins. Not only are membrane-bound proteins crucial to the function of biological synapses, but they are also important from a technological point of view. In this thesis, we use a Langmuir-Blodgett technique to produce lipid bilayers across apertures in a modified version of the Artificial Synapse Chip. These bilayers display many of the same properties as bilayers across apertures in Teflon films. In addition, these bilayers remain unbroken at transmembrane potentials over ?400 mV, higher than Teflon-supported bilayers. We also demonstrate single channel recordings from the staphylococcal protein pore a-hemolysin. The Artificial Synapse Chip is a platform for investigating a variety of biological systems. Using this device, we have studied membrane-bound proteins and developed a prototype interface for retinal prostheses. While this is only a proof of concept for a retinal prosthetic interface, it is a significant step towards mimicking neurotransmitter release during synaptic transmission From jules83 at stanford.edu Tue Jun 3 12:55:41 2003 From: jules83 at stanford.edu (Julia R Greer) Date: Tue, 3 Jun 2003 12:55:41 -0700 Subject: SEM problems Message-ID: Dear labmembers, This might be a silly question, but I would appreciate any help. I am trying to look at the X-section of my resist profiles in the SEM, and the damn thing is charging like CRAZY! I put conductive tape between the sample and the chuck and put a dot of it connecting the surface of the sample to the chuck, as well. I lowered the voltage all the way down to 1kV, and the whole image is still totally "swimming" Any tricks to look at the resist cross=section? Maybe I am missing something... THANK YOU! --Julia From janineh at stanford.edu Tue Jun 3 14:27:49 2003 From: janineh at stanford.edu (Janine Hannibal) Date: Tue, 03 Jun 2003 14:27:49 -0700 Subject: Keys Found in CAD Room 152 Message-ID: <3EDD12D5.3090706@stanford.edu> Hi, A keyring was found in the CIS building CAD Room 152. Please stop by my cubicle #41 to retrieve them. Thanks! Janine From cshen at briontech.com Tue Jun 3 15:35:39 2003 From: cshen at briontech.com (Chongfei Shen) Date: Tue, 3 Jun 2003 15:35:39 -0700 Subject: 6" foundry for small volumn production In-Reply-To: <6B29DC48E741BE46B96884DEC25BE66608A346@uhura.sensarray.com> Message-ID: Dear all, Thanks a lot for the many suggestions. I'm now mainly talking with Seaway, and visited their facility this morning. I'll evaluate other vendors too. Many thanks, Chongfei From cshen at briontech.com Tue Jun 3 15:45:35 2003 From: cshen at briontech.com (Chongfei Shen) Date: Tue, 3 Jun 2003 15:45:35 -0700 Subject: 6" foundry for small volumn production In-Reply-To: Message-ID: I put together this list for your reference: Process Specialties in Tracy Seaway Semiconductor in Livermore TFI in Fremont Elume Microfoundry in Simi Valley Silicon Microstructures (Milpitas). Contact: Mike Dunbar MegaSense (Sunnyvale) IMT (Santa Barbara area) OPTICNET INC in HAYWARD, CA. Talk to Martin Lim @ 510-300-1120 X 102 http://www.sp.htelabs.com/about.htm www.Colibrys.com http://siwaveinc.com/ ALTA MICROTEC (www.altamicrotec.com) IMMI (Los Angeles) Silicon Microstructures (www.si-micro.com) From ukris at fastloki.stanford.edu Tue Jun 3 15:55:55 2003 From: ukris at fastloki.stanford.edu (Uma Krishnamoorthy) Date: Tue, 3 Jun 2003 15:55:55 -0700 (PDT) Subject: STS etcher - gold contaminated Message-ID: Does anyone know of another STS etcher/any other fast anisotropic Silicon etcher that will accept gold-contaminated samples? I used Au-Au bonding on my structures and now cannot use the STS etcher at SNF. Any help is appreciated. Thanks, Uma ************************************************************** Uma Krishnamoorthy E.L.Ginzton Labs, Room 124 450 Via Palou Stanford, CA 94305 (650)724-4654 *************************************************************** From ukris at fastloki.stanford.edu Wed Jun 4 15:25:07 2003 From: ukris at fastloki.stanford.edu (Uma Krishnamoorthy) Date: Wed, 4 Jun 2003 15:25:07 -0700 (PDT) Subject: Compilation: Alternative DRIE Silicon etcher - gold contaminated Message-ID: Thanks to everyone who responded. Here is a summary of responses I received. I looked into some of these options. UCSB and Integrated Micromachines seem like possible options so far. Uma __________________________________________ 1. UCSB in Santa Barbara - Plasmatherm (Unaxis) DRIE. Contact: Jack Whaley 805-893-8174 whaley at ece.ucsb.edu Nanofabrication Facility Manager ________________________________________ 2. Integrated MicroMachines - STS etcher www.micromachines.com ***Note they are closing shop at the end of the month - not a long term option.*** ____________________________________________ 3. You may try contacting Mike Bruner or Jim Hunter of Silicon Light Machines.They have a STS etcher and may be able to help you. You can find the contact information in their web site: www.siliconlight.com ****They do not have an STS etcher but do have a XeF2 etcher for isotropic Silicon etching******** _____________________________________________ 4. Company: IMT Location: Goleta, CA Tel: 805 681 2837 Contact: John Forestor ______________________________________________ 5. There is an etcher at JPL in Pasadena. They take gold-contaminated samples. If you're interested in JPL, contact Yoshi Hishinuma (Yoshikazu.Hishinuma at jpl.nasa.gov). _________________________________________________ From mahnaz at snf.stanford.edu Fri Jun 6 14:22:22 2003 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Fri, 06 Jun 2003 14:22:22 -0700 Subject: Bonding presentation Message-ID: <3EE1060E.EED368C7@snf.stanford.edu> Hello all, I had asked Dr Shari Farrens to give a talk whenever she is in town on si-si bonding. The talk will be on Thursday 6/12 in the afternoon. More detail information will follow on time and place. Please mark your calendar and bring your questions. mahnaz Dr. Shari Farrens BIO Dr. Shari Farrens has 20 years experience in the semiconductor industry. Equipped with a B.S. degree in Physics from Nebraska Wesleyan University, Dr. Farrens acquired a M.S. degree in Nuclear Engineering studying hydrogen embrittlement in solids using high energy ion implantation from the University of Wisconsin, Madison. Building on her experimental background, Dr. Farrens acquired an additional M.S. degree in Materials Science writing computer simulations to analyze brittle fracture phenomena. Her final degree, a Ph.D. in Materials Science, investigated diffusion barriers for the seemingly crazy concept of copper metalization in the mid 1980?s. Dr. Farrens spent nine years as a research and teaching faculty at UC-Davis in the Electrical Engineering department. During that time she was instrumental in advancing many wafer bonding theories and patented in situ plasma activation bonding methods and tooling. Dr. Farrens joined EV Group as Chief Scientist in spring of 2002 after four years as Sr. Process Scientist at Silicon Genesis, an SOI wafer manufacturer specializing in ultra thin SOI. OR 1981 BS Physics, Nebraska Wesleyan University 1983 MS Nuclear Engineering, University of Wisconsin-Madison 1985 MS Materials Science, University of Wisconsin-Madison 1989 Ph.D. Materials Science, University of Wisconsin-Madison 1989-1999 Adjunct Assistant Professor, Electrical Engineering Department, UC Davis, Davis, CA 1998-2002 Sr. Process Scientist, Silicon Genesis Corporation, Campbell, CA 2002-present Chief Scientist EV Group, Phoenix, AZ Dr. Farrens is a specialist in SOI wafer bonding technology. She holds several patents in this area and has written numerous articles related to wafer bonding technologies. From zyun at phosistor.com Fri Jun 6 23:36:48 2003 From: zyun at phosistor.com (Zhisheng Yun) Date: Fri, 6 Jun 2003 23:36:48 -0700 Subject: Lots used instruments for sale References: Message-ID: <003401c32cbf$2d8ce550$1466c5ac@Zhisheng> Dear Labmembers, A few of my friends have bought all of the instruments and equipment from JDSU because of the company has closed the fab and R&D site at San Jose. Those stuffs are mostly for semiconductor, optical fiber telecommunications, electronics and educational applications, including hotplate, freezplate, temperature cycling oven, freezer, damp/heat test chamber, optical spectrum analyzer, lightwave measurement system, wavelength meter, tunable laser source, fiber fusing splicer, fiber cleaver, vibration-proof optical table, Laminar air flow hood, production floor table, cabinet, chairs etc. All the equipments are manufactured by top vendors. I'd like to mention that they have two brand new Excimer Laser systems: LambdaPhysik Compex 150 excimer laser and GSI Lumonics Index 800 series excimer laser. If you are interested, please contact at (925)580-5129 or access the website: www.hjprofessional.com for the detail. You also can come to have a look from 9:00am to 7:00pm Monday to Friday at 1768 Automation Park Way, Buliding 5, San Jose, CA95131. regards, Zhisheng ----- Original Message ----- From: "Dan Grupp" To: "Sanli Ergun" Cc: Sent: Monday, April 21, 2003 9:48 PM Subject: Re: cell phones > Be carefuL: it's not just the company, but the technology within that > company. That is, Cingular runs GSM and CDMA networks, and one may be > better than the other! Bottom line: if you get a recommendation, make sure > you get the same phone. > -dan > > ps - i've been very happy wiht GSM from Cingular with an ericsson T28 > World. Europe is GSM, too, so your phone works when you get off the plane. > COol. > > On Mon, 21 Apr 2003, Sanli Ergun wrote: > > > > > Thanks for the replies. Out of 10 people, 7 is happy with AT&T, 2 is happy > > with Cingular and 1 is happy with T-mobil. > > > > Sanli > > > > > > -------------------------------------------------------------------------- - > Dr. Daniel Grupp, Visiting Scholar > Center for Integrated Systems > Stanford University > Stanford, CA 94305 > (650) 724-6911 > FAX: 723-4659 > -------------------------------------------------------------------------- - > > > From jules83 at stanford.edu Mon Jun 9 12:05:37 2003 From: jules83 at stanford.edu (Julia R Greer) Date: Mon, 9 Jun 2003 12:05:37 -0700 Subject: What kind of dose on Nikon? Message-ID: Dear experts, Those of you who work with the Nikon stepper - do you know what kind of time (in ms) the 220mJ exposure dose corresponds to? I cannot find any information on the dose/exposure for the Nikon - all the other exposure tools are on-line except for this one :-( Thank you! --Julia It's all about making 83,000 Gold Nanopillars! -------------- next part -------------- A non-text attachment was scrubbed... Name: winmail.dat Type: application/ms-tnef Size: 1728 bytes Desc: not available URL: From mahnaz at snf.stanford.edu Tue Jun 10 10:50:39 2003 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Tue, 10 Jun 2003 10:50:39 -0700 Subject: [Fwd: Bonding presentation] Message-ID: <3EE61A6F.96678B43@snf.stanford.edu> Hello all, The talk will be on Thursday 6/12 at 2 pm in Auditorium Mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded message was scrubbed... From: Mahnaz Subject: Bonding presentation Date: Fri, 06 Jun 2003 14:22:22 -0700 Size: 3078 URL: From edward at piezo.Stanford.EDU Wed Jun 11 10:25:53 2003 From: edward at piezo.Stanford.EDU (Edward Haeggstrom) Date: Wed, 11 Jun 2003 10:25:53 -0700 (PDT) Subject: drytek 2 freed up 3pm-4.30pm Message-ID: From edward at piezo.Stanford.EDU Wed Jun 11 10:26:28 2003 From: edward at piezo.Stanford.EDU (Edward Haeggstrom) Date: Wed, 11 Jun 2003 10:26:28 -0700 (PDT) Subject: drytek 2 freed up 3pm-4.30pm Message-ID: From yongli at stanford.edu Wed Jun 11 11:22:21 2003 From: yongli at stanford.edu (Yongli Huang) Date: Wed, 11 Jun 2003 11:22:21 -0700 (PDT) Subject: drytek 2 freed up 12:00pm-2:00pm In-Reply-To: Message-ID: From ehkim at stanford.edu Wed Jun 11 12:50:36 2003 From: ehkim at stanford.edu (Eun-Ha Kim) Date: Wed, 11 Jun 2003 12:50:36 -0700 Subject: 4-point probe station Message-ID: <017c01c33052$ba9bcc90$316340ab@EUN> Hi Members, Does any of you know where I can access to 4-point probe station for small pieces? Prometrix in the lab doesn't work for small pieces. On-campus or local company would be very helpful. Thanks, Eunha ************************ Eun-Ha Kim CISX Building, Rm 300 Stanford University Stanford, CA 94305 Phone : (650) 725-0419 Email : ehkim at stanford.edu From true at snf.stanford.edu Wed Jun 11 15:23:31 2003 From: true at snf.stanford.edu (Randy True) Date: Wed, 11 Jun 2003 15:23:31 -0700 Subject: interest in polyimide coating on the track Message-ID: <3EE7ABE3.1020603@snf.stanford.edu> I'd like to see if there are any other labmembers out there who are also interested in spinning up polyimide (or any of the other thicker banned materials like PMMA, Cyclotene, and LOL) on the svgtrack. I see a significant improvement in uniformity, wafer to wafer, when using the svgtrack over the headway, mainly due to the controlled acceleration (the polyimide spec sheet calls for an intermediate spin step that is difficult to do consistently with the dial on the headway). Also, spinning wafers on the track eliminates tweezers marks because the wafers are transfered directly to the hotplate. Several months ago, the staff made a decision not to allow these materials on the track so I was having my polyimide spun up at an outside foundry (on a track system). That outside foundry (IMMI) is going out of buisness and now I again need to spin up my wafers at SNF. I would like to get together with some other users and try to find a compromise with the staff, and establish a time monthly or bimonthly, when we can spin up these materials on one of the svg tracks, followed by a thorough clean up. If necessary, it would be possible to get our own catchcup and clean it afterwards, taking care to prevent our material from getting into the drain by simply blocking the drain port on the catch cup. So, if you are currently spinning polyimide on the headway and dream of a better way, please email me. I think that if there are mutiple people who want to do this, we can convince the staff Thanks, Randy True From Spotworthy at aol.com Wed Jun 11 15:37:17 2003 From: Spotworthy at aol.com (Spotworthy at aol.com) Date: Wed, 11 Jun 2003 18:37:17 -0400 Subject: interest in polyimide coating on the track Message-ID: <5838801A.545BC433.0CEC25E7@aol.com> Randy, If you block the drain to the catch cup, you can expect your uniformity to be compromised. I have also seen cases where the polyimide adhesion went all to "heck" just by covering up the drain in a track system to coat polyimide with out contaminating that system. It might have something to do with residual solvents swirling around in the cup once you change the air flow pattern. You would be best served by having a separate dedicated polyimide track system. There are still some foundries here in the bay area that may provide this service. I believe CShen sent out an email with information on local foundries that do six inch processing. I am sure that many still have their 4 in lines and equipment still up, and they will probably be glad for the business. Linda W. From mahnaz at snf.stanford.edu Thu Jun 12 11:10:07 2003 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Thu, 12 Jun 2003 11:10:07 -0700 Subject: [Fwd: [Fwd: Bonding presentation]] Message-ID: <3EE8C1FF.FBBFB713@snf.stanford.edu> Kind reminder that the talk is today. mahnaz -------------- next part -------------- An embedded message was scrubbed... From: Mahnaz Subject: [Fwd: Bonding presentation] Date: Tue, 10 Jun 2003 10:50:39 -0700 Size: 5630 URL: From mtang at snf.stanford.edu Thu Jun 12 12:21:06 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 12 Jun 2003 12:21:06 -0700 Subject: Lab Storage Bins Message-ID: <3EE8D2A2.BBF8B315@snf.stanford.edu> Labmembers: I'm back! [Much] leaner and meaner than before, and absolutely determined to get a handle on the storage bins in the lab. We are completely out of bins, and don't have any to offer new labmembers nor to the REU students who start in a little more than a week. There are many reasons for this, many valid but some not -- most egregious is that there are "squatters" who using multiple bins that have not been assigned to them. However, I'll allow the benefit of doubt and assume that "squatters" are simply unaware of the guidelines governing lab storage. If you need a refresher, please review them at: http://snf.stanford.edu/Labmembers/Storage.html I've posted the official lab bin assignments at: http://snf.stanford.edu/Labmembers/PersonalBins.html -- Granted, the list is a little outdated, but please take a minute to check if your bin assignment appears on this list. If it doesn't, then your belongings may be subject to removal. They will be stored in our lost-and-found and if they go unclaimed for a month, they will be discarded or recycled (and I'm sure you don't really want to lose your stuff -- from the cleanup in December, we reclaimed some great stuff: a package of unused AFM tips and several boxes of brand new wafers, some of them SOI...) Please also notify us of any changes (i.e., someone is taking over someone else's project and his/her bin.) And please understand that bins are assigned to labmembers who have been active in the lab in recent months. If you have not used the lab in the past few months, you will be asked to remove your things (and if everyone did this, we'd have plenty of bins to go around!) And please, please, please do not use empty lab bins without checking with us -- we are working on the "low inventory mangement" and "just-in-time" principles -- the whole concept only works if there is always a small excess of bins. Please email me (for now) for all bin inquiries, updates, and change requests. Thanks for your attention -- Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From jwc at snf.stanford.edu Fri Jun 13 18:42:38 2003 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Jun 2003 18:42:38 -0700 Subject: Desperately seeking a box of AFM Tips that was delivered to my cubicle. Message-ID: <3EEA7D8D.A7BBB949@snf.stanford.edu> Hello Lab Members: I am asking all Labmembers to take a look around and see if you can please help me locate a small box of conductive cantilevers which were delivered by mail and placed on my desk WED. May 28, 2003. Upon my return from Three Beams on June 2, 2003 it came to my attention that this package had been likely taken from my cubicle. I really cannot believe that anyone would take anything from anyone else's cubicle here at CIS. However these were not samples and they represent a significant expenditure of un-budgetted funds for SNF during this time of financial crisis. If we cannot locate these items it will delay and possibly negatively impact a collaboration we have with University of Nevada Reno. TM Microscopes (Veeco Metrology Group) Sunnyvale CA. This is a package of 25 Ultra lever SPM tips. They have a coating of Au to make them conductive. $885.00 Please bring them back! Thank you, James Conway E-beam Technology Group Stanford Nanofabrication Facility 650-725-7075 From rcrane at snf.stanford.edu Mon Jun 16 17:12:45 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 16 Jun 2003 17:12:45 -0700 Subject: Acid waste neutralizer not available 6-17 0800-1130 Message-ID: <3EEE5CFD.9F55D0CB@snf.stanford.edu> Fab users and CISX wetbench users, Facilities & Operation will be performing maintenance on the acid waste neutralizing system which services both the SNF fab and the wetbenches of CISX. The work will take place on Tuesday, June 17, From 0800 to 1130. Please do not drain any hot pots or strong acids or bases during this time. Normal wetbench processing including QDR and SRD work may be done. HF drains are not affected by this work and may be used normally. Thank you for your cooperation, Dick From eadensaw at hotmail.com Tue Jun 17 05:03:18 2003 From: eadensaw at hotmail.com (Eaden Saw) Date: Tue, 17 Jun 2003 05:03:18 -0700 Subject: Please don't remove my account Message-ID: My account was full. Please don't remove my address. Thanks Eaden -------------- next part -------------- An HTML attachment was scrubbed... URL: From ababu at stanford.edu Tue Jun 17 10:44:17 2003 From: ababu at stanford.edu (ababu at stanford.edu) Date: Tue, 17 Jun 2003 10:44:17 -0700 Subject: Please don't remove my account In-Reply-To: References: Message-ID: <1055871857.3eef53717386e@webmail.stanford.edu> I'm not going to be using the facilities for a while, how do I unsubscribe to all the email lists? Thanks. From rcrane at snf.stanford.edu Tue Jun 17 10:59:07 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 17 Jun 2003 10:59:07 -0700 Subject: AWN ready for use Message-ID: <3EEF56EB.544CB3E@snf.stanford.edu> Fab users and CISX wetbench users, The acid waste neutralizer system is back up to operational status. Please feel free to use acid waste drains as you would normally. Thanks, Dick Crane Facilities & Operation will be performing maintenance on the acid waste neutralizing system which services both the SNF fab and the wetbenches of CISX. The work will take place on Tuesday, June 17, From 0800 to 1130. Please do not drain any hot pots or strong acids or bases during this time. Normal wetbench processing including QDR and SRD work may be done. HF drains are not affected by this work and may be used normally. Thank you for your cooperation, Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: From una at stanford.edu Tue Jun 17 11:43:49 2003 From: una at stanford.edu (Anuranjita Tewary) Date: Tue, 17 Jun 2003 11:43:49 -0700 Subject: Nanotechnology Forum June 26 at Stanford Message-ID: <5.1.1.5.2.20030617112808.00b512e8@una.pobox.stanford.edu> It is our distinct pleasure to invite you to the upcoming event of the MIT Stanford UC Berkeley Nanotechnology Forum. Nanotech Business Panel What are Fortune 500 Companies Doing in Nanotechnology? The panel discussion will feature industry luminaries who will talk about the nanotechnology initiatives of IBM, Hewlett-Packard and ChevronTexaco. The panelists are Dr. Hans Coufal (IBM), Dr. Stan Williams (HP) and Dr. Waqar Qureshi (ChevronTexaco). The panel will be moderated by Steve Jurvetson, managing director of Draper Fisher Jurvetson, the most prominent and active venture fund in nanotechnology. The event will be held on June 26 at the TCSEQ auditorium at Stanford University from 6-9 pm. For event registration, details, and directions, please go to www.mitstanfordberkeleynano.org. Due to great interest in the event, we would request you to register online at your earliest convenience. Our previous event "Nanotechnology beyond the hype" featured Nobel laureate Steven Chu, Prof. Paul Alivisatos and Dr. Meyya Meyyappan. The event was attended by more than 500 people, including prominent presence from Fortune 500 companies, as well as the investment and academic communities. About the MIT Stanford UC Berkeley Nanotechnology Forum: The Nanotechnology Forum is an entity dedicated to promoting the burgeoning field of nanotechnology by connecting ideas, technology and people. We intend to create a credible forum that would combine high standards of inquiry with superior access to luminaries in the promotion of this ever-expanding field. The Nanotechnology Forum primarily serves the 40K+ alumni of MIT, Stanford and the University of California, Berkeley residenting in Northern California. However, our events are open to anyone interested or active in the field of nanotechnology. -------------- next part -------------- An HTML attachment was scrubbed... URL: From zlrao at stanford.edu Tue Jun 17 23:05:47 2003 From: zlrao at stanford.edu (Zhilong Rao) Date: Tue, 17 Jun 2003 23:05:47 -0700 Subject: SiO2 Deposition References: Message-ID: <001001c3355f$a952ffa0$39aa0c80@Rao> Dear labmembers: Does any of you know any facility at Stanford that could do Silicon Oxide deposition? THANK YOU!! Zhilong From zlrao at stanford.edu Wed Jun 18 22:38:49 2003 From: zlrao at stanford.edu (Zhilong Rao) Date: Wed, 18 Jun 2003 22:38:49 -0700 Subject: SiO2 Deposition References: Message-ID: <002301c33625$0f4e85c0$39aa0c80@Rao> Dear labmembers: Thank you for all those kind responses. I need to deposite about 250nm thick SiO2 on the cross section of a small wafer piece of edge emitting lasers. The deposition thickness needs relatively precise control. Since the wafer piece has to be mounted onto a carrier wafer with some sort of adhesive tape. I am not sure what tape can go through 300-400C in STS PECVD or Tylan LTO LPCVD system. Does anyone know any evaporation or sputtering system at Stanford that could do this? Thanks a lot! Zhilong ----- Original Message ----- From: "Alireza Nojeh" To: "Zhilong Rao" Sent: Wednesday, June 18, 2003 9:50 AM Subject: Re: SiO2 Deposition > > Hi Zhilong, > > Have you looked into the LTO (Low-Temperature Oxide) furnaces and the STS > PECVD deposition system in the SNF clean room? You can find out more on > the SNF webpage. > > Hope this helps, > Ali > > On Tue, 17 Jun 2003, Zhilong Rao wrote: > > > Dear labmembers: > > > > Does any of you know any facility at Stanford that could do Silicon Oxide > > deposition? > > > > THANK YOU!! > > > > Zhilong > > > From mtang at snf.stanford.edu Thu Jun 19 07:22:37 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 19 Jun 2003 07:22:37 -0700 Subject: SiO2 Deposition References: <002301c33625$0f4e85c0$39aa0c80@Rao> Message-ID: <3EF1C72D.392BC0B6@snf.stanford.edu> Hi Zhilong and others -- Just a couple of comments... First, use of the labmembers at snf email is highly encouraged for asking general questions, just like this (you will find, though, much more useful responses if you provide a little more detailed information about your needs, as you have in this second email.) Second, non-standard processing such as this (considering the use of mounting tape on wafers to be processed through sts or tylanbpsg) must be cleared through the Special Materials Committee. We can be contacted at specmat at snf.stanford.edu. The members of the committee are Jim McVitttie, Mahnaz Mansourpour, John Shott, Mike Deal, and yours truly. (By the way, tape should not be used on either of these systems -- it would burn and mess things up for other people -- however, they may be other alternatives that might do the trick -- SpecMat has a long list of things that have been approved and work in the lab. Give us a try!) Thanks for your attention -- Mary Zhilong Rao wrote: > Dear labmembers: > > Thank you for all those kind responses. I need to deposite about 250nm thick > SiO2 on the cross section of a small wafer piece of edge emitting lasers. > The deposition thickness needs relatively precise control. Since the wafer > piece has to be mounted onto a carrier wafer with some sort of adhesive > tape. I am not sure what tape can go through 300-400C in STS PECVD or Tylan > LTO LPCVD system. Does anyone know any evaporation or sputtering system at > Stanford that could do this? > > Thanks a lot! > > Zhilong > ----- Original Message ----- > From: "Alireza Nojeh" > To: "Zhilong Rao" > Sent: Wednesday, June 18, 2003 9:50 AM > Subject: Re: SiO2 Deposition > > > > > Hi Zhilong, > > > > Have you looked into the LTO (Low-Temperature Oxide) furnaces and the STS > > PECVD deposition system in the SNF clean room? You can find out more on > > the SNF webpage. > > > > Hope this helps, > > Ali > > > > On Tue, 17 Jun 2003, Zhilong Rao wrote: > > > > > Dear labmembers: > > > > > > Does any of you know any facility at Stanford that could do Silicon > Oxide > > > deposition? > > > > > > THANK YOU!! > > > > > > Zhilong > > > > > -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From jerabek at snf.stanford.edu Thu Jun 19 16:25:33 2003 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Thu, 19 Jun 2003 16:25:33 -0700 (PDT) Subject: LRS-18 mask writer Message-ID: To whom it may concern, LRS-18 laser mask writer is down for exposure laser replacement.The old one lasted only six weeks due to some internal failure.If everything goes right the machine should be back in service by Monday 23rd. -Paul From zappe at stanford.edu Fri Jun 20 11:24:23 2003 From: zappe at stanford.edu (Stefan Zappe) Date: Fri, 20 Jun 2003 11:24:23 -0700 Subject: Cheap Pyrex substrates - sharing amorphous silicon coating run Message-ID: <5.1.0.14.2.20030620111438.02af0008@zappe.pobox.stanford.edu> Hi, I have two questions: Where can I buy CHEAP double side polished 4" Pyrex substrates (suitable for anodic bonding) thickness: 250-300 um, not thicker !!! Bullen Ultrasonic sells them for approx. $60 a piece (if less than 50 are bought). I want to buy 25 Pyrex wafer and want to coat them with 150 nm of amorphous silicon at 510degC (as HF etch mask). A run with 50 wafers at STRATAGLASS costs approx. $1200. Is anybody interested in having 25 Pyrex wafers coated with amorphous Silicon as well and sharing a run and the costs with me ? Thanks, Stefan -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerabek at snf.stanford.edu Fri Jun 20 16:32:54 2003 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Fri, 20 Jun 2003 16:32:54 -0700 (PDT) Subject: LRS-18 mask writer Message-ID: To whom it may concern, exposure laser has been replaced and aligned.I have written two masks since and everything looks very good.System is back on line. -Paul From djackrel at stanford.edu Mon Jun 23 17:53:27 2003 From: djackrel at stanford.edu (David Bryan Jackrel) Date: Mon, 23 Jun 2003 17:53:27 -0700 (PDT) Subject: MISSING MASKS! Message-ID: SNF Lab Members- I was just in the lab and 2 of my masks went missing. They were sitting near the hot plates, across from the KarlSuss's and while I was developing my wafers they disappeared. The name on the mask holders is David Jackrel, and the masks are called 'NCON' and 'MESA'. I need these masks for some processing that I am doing tomorrow! Please, if anyone may have taken them by mistake, let me know immediately. They went missing between 4 and 5PM today, Monday June 23rd. Thank you very much, and sorry for flooding everyone's inbox. -David //o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o// David Jackrel djackrel at stanford.edu Dept. of Materials Science and Engineering Stanford University ......................................... .Center for Integrated Systems Extension. .420 Via Palou | . .MS 4070 \|/ . .Stanford, CA 94305-4070 ---O--- . .phone: (650)725-7699 /|\ . .fax: (650)723-4659 | . ......................................... From mtang at snf.stanford.edu Tue Jun 24 09:10:43 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 24 Jun 2003 09:10:43 -0700 Subject: smallTalk 2003 Message-ID: <3EF87803.4DEC8A6F@snf.stanford.edu> Greetings Labmembers: Here's another conference which might be of interest to anyone in (or wants to learn about) miniaturization in chemistry and biology. (SNF is informing you of this event, as the organizers are sponsoring us, in return, so I'm just letting you know that this is a bit of a commercial announcement...) The event is smallTalk 2003, organized by the Association for Laboratory Automation (ALA). This will be held in San Jose, from July 13-16. Michael Ascher, M.D., Lawrence Livermore National Laboratory, is the Keynote Speaker and his talk will be on the Public Health Response to the Threat of Bioterrorism. There are short courses (on microfluidics, microarrays, microfab, and modelling of microfluidics), conference presentations, and an exhibit hall (check out SNF's table!) On a totally personal note: This conference has a darned good lineup (what can I say? My post-doc advisor is one of the featured speakers) and covers some new technologies that I haven't heard of before. It also covers a broad range of bio-applications so is good if you just want a survey of what's out there. The ALA is a non-profit organization with the goal of facilitating and providing education in the field of laboratory technologies (students: registration is only $25! Yes, $25!! And it includes a short course of your choice!) If you register before June 27, you save $100 (no, you don't get $75 back if you're a student.) The non-student registration fee is $1200 and short courses are extra (still a very good deal, though, when compared with the commercial conferences.) To find out more, check out http://labautomation.org/smallTalk/ST03 or call 505-988-5326. I'm planning on going -- hope to see a lot of students there! Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From Jane.Edwards at stanford.edu Tue Jun 24 10:11:22 2003 From: Jane.Edwards at stanford.edu (Jane Edwards) Date: Tue, 24 Jun 2003 10:11:22 -0700 Subject: Farewell Party for Janine Hannibal Message-ID: Hi, As many of you already know, Janine, our Lab Services Administrator Extraordinaire, will be leaving Stanford. Please join us on Thursday, June 26 at 3pm in the SNF office area to help us say farewell. Janine has been a great asset to SNF and we will all miss her. Thanks, -The SNF Staff -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jane.Edwards at stanford.edu Wed Jun 25 16:15:50 2003 From: Jane.Edwards at stanford.edu (Jane Edwards) Date: Wed, 25 Jun 2003 16:15:50 -0700 Subject: International Workshop on Metal Gate/Work Function Science and Engineering Message-ID: Dear Friends and Colleagues, We are glad to announce the International Workshop on Metal Gate/Work Function Science and Engineering which will be held August 28th and 29th, 2003 on the Stanford Campus. The detailed information for the Workshop and registration can be found on the website http://www.stanford.edu/dept/chemistry/faculty/chidsey/public/Workfuncti on_Engineering/index.html We will feature a set of distinguished speakers from the US, Europe and Japan, speaking on both theoretical and experimental issues. We will also have student posters. As we come closer to the limit of scaled CMOS, metal gate electrodes and high-K gate dielectrics are indispensable alternatives to polysilicon/silicon dioxide gates, and a broad spectrum of technical and scientific challenges are facing us. We believe this workshop will provide an exciting opportunity and forum to discuss metal gate and workfunction issues, and we strongly invite your participation. Please feel free to pass this announcement on to your colleagues. Sincerely, Yoshio Nishi, Stanford Paul McIntyre, Stanford Luigi Colombo, Texas Instruments Chris Chidsey, Stanford -------------- next part -------------- An HTML attachment was scrubbed... URL: From cshen at briontech.com Thu Jun 26 14:05:34 2003 From: cshen at briontech.com (Chongfei Shen) Date: Thu, 26 Jun 2003 14:05:34 -0700 Subject: optical coating company Message-ID: Dear labmembers, Does anyone know of any good optical coating companies at bay area? Thanks a lot for your information. Chongfei From jules83 at stanford.edu Thu Jun 26 16:12:15 2003 From: jules83 at stanford.edu (Julia R Greer) Date: Thu, 26 Jun 2003 16:12:15 -0700 Subject: Has anyone seen my notebook? Message-ID: Dear users, Could you please tell me whether you might have found my cleanroom notebook? I left it sitting in the gowning room, and now it's tiotally missing :-( Thank you! -Julia -------------- next part -------------- A non-text attachment was scrubbed... Name: winmail.dat Type: application/ms-tnef Size: 3164 bytes Desc: not available URL: From susans at caltech.edu Thu Jun 26 16:18:28 2003 From: susans at caltech.edu (Susan Schofer) Date: Thu, 26 Jun 2003 16:18:28 -0700 Subject: Has anyone seen my notebook? In-Reply-To: Message-ID: <7E93C639-A82C-11D7-8290-000393C372E0@caltech.edu> I have no idea why I am on this e mail list. Please remove my name! Susan -- Susan J. Schofer Dept. of Chemistry and Chemical Engineering California Institute of Technology MC 127-72 Pasadena, CA 91125 Phone: (626) 395 6576 From CROZIER at asu.edu Thu Jun 26 16:18:22 2003 From: CROZIER at asu.edu (Peter Crozier) Date: Thu, 26 Jun 2003 16:18:22 -0700 Subject: Has anyone seen my notebook? Message-ID: <3B52F61A5FE51149BD51A2409B0D2FED212A16@ex2.asurite.ad.asu.edu> How did I get on this list- can someone please remove me from this list. Thanks Peter Crozier -----Original Message----- From: Julia R Greer [mailto:jules83 at stanford.edu] Sent: Thu 6/26/2003 4:12 PM To: labmembers at snf.stanford.edu Cc: Subject: Has anyone seen my notebook? Dear users, Could you please tell me whether you might have found my cleanroom notebook? I left it sitting in the gowning room, and now it???s tiotally missing :-( Thank you! -Julia -------------- next part -------------- An HTML attachment was scrubbed... URL: From sbuchsbaum at darpa.mil Thu Jun 26 16:25:34 2003 From: sbuchsbaum at darpa.mil (sbuchsbaum) Date: Thu, 26 Jun 2003 19:25:34 -0400 Subject: Has anyone seen my notebook? Message-ID: Please remove me from this mail-group. And no Julia, I have not seen your notebook. > -----Original Message----- > From: Julia R Greer [mailto:jules83 at stanford.edu > ] > Sent: Thursday, June 26, 2003 7:12 PM > To: labmembers at snf.stanford.edu > Subject: Has anyone seen my notebook? > > Dear users, > > Could you please tell me whether you might have found my cleanroom > notebook? I left it sitting in the gowning room, and now it's tiotally > missing :-( > > Thank you! > -Julia -------------- next part -------------- An HTML attachment was scrubbed... URL: From John.Ryan at JPMorganPartners.com Thu Jun 26 16:30:11 2003 From: John.Ryan at JPMorganPartners.com (Ryan, John JPMP) Date: Thu, 26 Jun 2003 19:30:11 -0400 Subject: Has anyone seen my notebook? Message-ID: I also do not know how I got on this list or even what this list is for. Please remove my email address as well. Thanks, John Ryan JPMorgan Partners 50 California Street, 29th Floor San Francisco, CA 94111 Phone: (415) 591-1285 Fax: (415) 591-1205 -----Original Message----- From: Susan Schofer [mailto:susans at caltech.edu] Sent: Thursday, June 26, 2003 4:18 PM To: Julia R Greer Cc: labmembers at snf.stanford.edu Subject: Re: Has anyone seen my notebook? I have no idea why I am on this e mail list. Please remove my name! Susan -- Susan J. Schofer Dept. of Chemistry and Chemical Engineering California Institute of Technology MC 127-72 Pasadena, CA 91125 Phone: (626) 395 6576 From christel.sorin at ftna.com Thu Jun 26 16:30:23 2003 From: christel.sorin at ftna.com (Christel SORIN) Date: Thu, 26 Jun 2003 19:30:23 -0400 Subject: Please remove me from this mailing list ! Message-ID: Thanks ... Christel SORIN Vice President, Research and Development France Telecom North America & France Telecom R&D Work: 212 332 21 29 Fax: 212 245 86 05 E-Mail: christel.sorin at francetelecom.com 1270 Avenue of the Americas New York, NY 10020 USA "Julia R Greer" 06/26/2003 07:12 PM To: cc: Subject: Has anyone seen my notebook? Dear users, Could you please tell me whether you might have found my cleanroom notebook? I left it sitting in the gowning room, and now it's tiotally missing :-( Thank you! -Julia -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: winmail.dat Type: application/octet-stream Size: 3164 bytes Desc: not available URL: From shott at snf.stanford.edu Fri Jun 27 12:58:38 2003 From: shott at snf.stanford.edu (John Shott) Date: Fri, 27 Jun 2003 12:58:38 -0700 Subject: Shades update ... Message-ID: <3EFCA1EE.9B4FC47F@snf.stanford.edu> SNF Lab Members: As you know, shades has been down for several days. This was due to a hardware failure. The old shades computer has been replaced and we believe that we have restored everyone's files and virtually all of the software. We need new licenses for both Caprox and the process/device simulation tools because the "serial number" of the hardware is encrypted in each of these licenses. We have the new license from Caprox, it has been installed, and we believe that Caprox is fully functional. The process/device simulation tools will not be avialable until we get an updated license from Synopsys. We have also verified that files can be transferred to beamer. So, we are going to release shades for normal use. However, be on the lookout for things that don't work or behave differently ... there may still be some underlying software issues that are not completely ironed out. Thanks for your continued support, John From mtang at snf.stanford.edu Fri Jun 27 10:31:53 2003 From: mtang at snf.stanford.edu (Mary Tang) Date: Fri, 27 Jun 2003 10:31:53 -0700 Subject: Summer REU's Message-ID: <3EFC7F89.2F088BB@snf.stanford.edu> Greetings Labmembers: Summer is the season of research interns. Between the EE, CPIMA, and NNUN programs, we have 17 or so undergraduate students from different schools who will be doing research projects at SNF for various Stanford faculty. They will begin converging onto the lab next week. On behalf of the process staff, I just wanted to let you know that since they are here for only a few weeks, they may given priority for some training and equipment access. When you see any of them in the lab, please take a moment to say "hi" and feel free to tell them about the wonders and joys of grad school (as it seems that at least one per year eventually makes his/her way back here as a grad student.) Mary -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From bashar at snf.stanford.edu Fri Jun 27 01:37:26 2003 From: bashar at snf.stanford.edu (Shabbir A. Bashar, Ph.D.) Date: Fri, 27 Jun 2003 01:37:26 -0700 Subject: Question about PhotoLuminescence Measurement Message-ID: Hi everyone, We used to do PL measurements at UCLA Nanofab but unfortunately the laser in their system is out indefinitely. I would appreciate any pointers to unversity departments or service companies where I can do this. I prefer a location in the Bay Area or Southern California (LA, Irvine, Santa Barbara etc.,) as first choice but will mail these out farther if no other option is available. I have both 4" and 2" wafers and am partial to cutting them into smaller pieces if it is absolutely necessary. For the first round of measurements (photoluminecense intensity and life time of Erbium ion) the testing facility needs following equipment: LN cooled Ge detector Ar Laser (200 mw @488nm ) Momochromator Lock-in Amplifier (PS: Please do NOT remove me from this mailing list! :)) -------- Shabbir A. Bashar, Ph.D. bashar at snf.stanford.edu From song_pang at yahoo.com Sun Jun 29 18:39:46 2003 From: song_pang at yahoo.com (Song Pang) Date: Sun, 29 Jun 2003 18:39:46 -0700 (PDT) Subject: Resist harden process Message-ID: <20030630013946.7459.qmail@web40017.mail.yahoo.com> Dear SNF friends, I am looking into resist harden phenomena lately and found that at SNF's Drytek RIE there is a 'resist harden' process available. I am a member of SNF but not trained for RIE and I hardly spent any time for the last year and half. If you can help me find out the following information will be appreciated, 1. Which process can be used to harden resist? Gas, power etc. 2. How thick is the hardened resist? Thank you so much. Stuart __________________________________ Do you Yahoo!? SBC Yahoo! DSL - Now only $29.95 per month! http://sbc.yahoo.com