Bromine-methanol

Mark Wistey wistey at snowmass.Stanford.EDU
Mon Mar 10 13:30:38 PST 2003


I was wondering, does anyone have experience with a bromine-methanol
etch?  We need to remove indium and heavy metals (As, Sb) from some
wafer holders which are going into ultrahigh vacuum.  We've been told
by one source not to use bromine-methanol unless we understand the 
"do's and don'ts"... but not what those are.  Presumably mixing of
acid and solvent...?

Thanks for any help or pointers...

 - Mark



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