ZnO Deposition

Katsuo Kurabayashi katsuo at umich.edu
Wed Oct 1 10:01:47 PDT 2003

Does anyone know where you can deposit a ZnO layer on a silicon wafer using 
sputtering? Is the microfab lab in Ginzton still available for that? If you 
know any information on it, please let me know.

Thank you,

Katsuo Kurabayashi, Ph.D.
Assistant Professor
Mechanical Engineering &
Macromolecular Science and Engineering
University of Michigan
Room 2272 G.G. Brown Lab
Ann Arbor, MI 48109-2125
Tel: (734) 615-5211
Fax: (734) 647-3170
e-mail: katsuo at umich.edu
Web: http://www-personal.umich.edu/~katsuo

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20031001/80317837/attachment.html>

More information about the labmembers mailing list