ZnO Deposition

Katsuo Kurabayashi katsuo at umich.edu
Wed Oct 1 10:01:47 PDT 2003


Does anyone know where you can deposit a ZnO layer on a silicon wafer using 
sputtering? Is the microfab lab in Ginzton still available for that? If you 
know any information on it, please let me know.

Thank you,

*************************************************************
Katsuo Kurabayashi, Ph.D.
Assistant Professor
Mechanical Engineering &
Macromolecular Science and Engineering
University of Michigan
Room 2272 G.G. Brown Lab
Ann Arbor, MI 48109-2125
Tel: (734) 615-5211
Fax: (734) 647-3170
e-mail: katsuo at umich.edu
Web: http://www-personal.umich.edu/~katsuo
***************************************************************

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