Dry etching titania

Vignesh G Shankar vigneshg at stanford.edu
Wed Oct 15 11:56:01 PDT 2003


Hi,

I could really use some help with some information on dry etching titania.

I am in need of a fairly anisotropic etch into titania, with a large aspect 
ratio. I wonder if anyone has done RIE (or something else) on titania and 
has any info / recipes / references that might be of use to me.

Thanks.
- Vignesh




More information about the labmembers mailing list