Dry etching titania

Vignesh G Shankar vigneshg at stanford.edu
Wed Oct 15 11:56:01 PDT 2003


I could really use some help with some information on dry etching titania.

I am in need of a fairly anisotropic etch into titania, with a large aspect 
ratio. I wonder if anyone has done RIE (or something else) on titania and 
has any info / recipes / references that might be of use to me.

- Vignesh

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