XeF2 Etching Presentation

Mary Tang mtang at snf.stanford.edu
Thu Oct 16 11:43:09 PDT 2003

Greetings Labmembers --

Several labmembers have used and expressed interest in acquiring XeF2
etching capability at SNF, so we've invited David Springer, from XACTIX
to give a seminar on this subject.


Xenon Difluoride Silicon Etch: A Key Process Technology for MEMS
Thursday, Oct. 23, 2003
CIS Room 101 (The Linville Room)
Seminar 2:00pm - 3:00pm
Refreshments and Discussion 3:00pm - 4:00pm

A Rapidly growing number of companies and major MEMS R&D centers,
Analog Devices, Northrop Grumman, Mitsubishi, NIST, NASA, Berkeley, Cal
and Stanford, are using isotropic etching of silicon with xenon
difluoride for
MEMS release and for creating micro structures. The xenon difluoride
etch is a
dry, gas phase etch, highly selective to a large number of materials,
provides substantial benefits over wet or plasma etch processes.

In this seminar Dr. Springer will describe the etching process and
some of the most recent products and research using xenon difluoride
etch. These will serve as examples to demonstrate the many advantages of

releasing MEMS using xenon difluoride including its excellent "reach",
the wide
variety of materials which can now be used in manufacturing MEMS devices
the ability to integrate MEMS with electronics, perform long undercuts
release using nano-scale release holes and  release layers.

Refreshments will be served.

David Springer is President of XACTIX, Inc, the leading supplier of
difluoride silicon etch equipment. David received his Ph.D. in Computer
engineering from Carnegie Mellon in 2001. Before joining XACTIX David
active in the Electronic Design Automation industry including an
period as president and founder of DASYS, Inc. which pioneered tools
the behavioral design of ASICS and FPGAs with physical design.

Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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