Si etch rate?

Julia R Greer jules83 at
Thu Oct 16 17:21:09 PDT 2003


I was wondering if anyone ever etched Poly-Si in Chamber A in P5000? I need
to figure out my etch rate for etching 3um deep into Poly-Si...

Thank you!

It's all about making 83,000 Gold Nanopillars!

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