Pt etching on MRC Low Pressure Reactive Ion Etcher

[Mary Calarrudo]

Labmembers,

 

I am having a problem with uniformity when etching platinum.  Has anyone
else had a problem with uniformity when etching platinum, and are there
any suggestions to help me with this problem.  

 

Mary Calarrudo

Associate Process Engineer

Unity Semiconductor Corporation

250 North Wolfe Road

Sunnyvale, CA 94085

 

mcalarrudo at unitysemi.com

408-737-7200  x111

 

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