etching depth of 500um

Fu-Min Wang fumin at stanford.edu
Fri Apr 9 14:32:05 PDT 2004


Dear labmembers,

I am looking for the feasibility of etching a 500 um wide channel down to 500 um deep and I will look for some thicker wafer about 600-700 um. Two issues here: (1) how do you accurately control the etch depth of 500 um ? (2) How do you precisely measure the depth of 500 um range? Your suggestions are highly appreciated.

Fumin
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