Nb film etching recipe

Na Young Kim nayoung at stanford.edu
Thu Apr 15 15:44:44 PDT 2004


Dear all,

Does anyone know about the etching of Niobium (Nb) film whose thinkness 
would be around 300nm? If so, do you mind sharing the recipe?

Someone mentions dry etching, but no specific or optimum recipe for Nb is 
available to my knowledge. If any of you knows the useful website or 
reference, please let me know.

Thank you,
Na Young



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