selective etch question

Kai Ma kaima at
Mon Apr 26 02:16:20 PDT 2004

Dear labmembers:

I am wondering if there is a way to selectively etch GaAs film
(possibly poly-GaAs) on top of 250A TiN (not to damage TiN)? Thank you
very much for your advice!

Or, maybe you can suggest a good source to search? Many thanks!


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