PECVD Nitride densification

Eric Tao erictao at stanford.edu
Sat Aug 21 12:51:06 PDT 2004


HI all,

Anyone has experience of densifying Silicon Nitride layer deposited with 
PECVD? What temp. did you use and how much was it densified?  (I have metal 
layer underneath). Thanks in advance.

-eric




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