Gasonic and Matrix Ashers

Ed Myers edmyers at
Mon Aug 23 11:48:28 PDT 2004

SNF Lab Members,

The Gasonic Aura Asher is ready for use.  The tool is designated strictly 
for Non-metals and Standard Metals Only.  The asher is for whole wafers 
only, no pieces will be allowed in the tool.

The Gasonic will be replacing the Matrix Asher as the Clean Asher for the 
facility.  The goal is to have all certified Matrix users transfer their 
processes to the Gasonic by Oct. 1st.  Beginning October 1st, the Matrix 
Asher will migrate to the Gold Contaminated equipment group and become 
available for processing gold contaminated wafers.

There will be a general training session on Thursday Aug. 26th at 2:00 pm 
at the Gasonic which is open for anyone to attend.

Training can be scheduled by emailing Ed Myers at emyers at 
or edmyers at


Ed Myers
Stanford Nanofabrication Facility
CIS Room 143, Mail Code 4070
Stanford, CA  94305
edmyers at

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