thickness vs. thermal expansion match

Ke Wang curlwang at stanford.edu
Wed Jul 28 17:05:17 PDT 2004


Hello labmembers,

This is probably a fab 101 question. I'm depositing a stack of films
(poly, oxide, nitride), and I wish to have their thermal expansion
coefficients matched, thus minimizing the stress. I know the relative
proportions of film thickness will be critical. But the question is, how
to actually calculate that? Or is it entirely empirical?
Thanks a lot!

Ke

_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040






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