thickness vs. thermal expansion match
curlwang at stanford.edu
Wed Jul 28 17:05:17 PDT 2004
This is probably a fab 101 question. I'm depositing a stack of films
(poly, oxide, nitride), and I wish to have their thermal expansion
coefficients matched, thus minimizing the stress. I know the relative
proportions of film thickness will be critical. But the question is, how
to actually calculate that? Or is it entirely empirical?
Thanks a lot!
Department of Applied Physics, Stanford University
Stanford, CA 94305-4070
More information about the labmembers