Litho area humidity control
rcrane at snf.stanford.edu
Tue Jun 15 11:52:07 PDT 2004
Litho area users:
As part of the humidifier water quality upgrade project for the litho
area, on Monday, June 28, from 0700 through 1500, steam, for the
humidifiers, will be turned off for up to eight hours. This shutdown
will affect the litho area's ability to maintain 45% (+/- 5%) if the
outside air (make-up air) is dryer than 45%. If the litho area air
becomes dry, this condition will affect photoresist coatings performance
(line resolution). If your process is critical, please avoid using the
coat and expose tools in the litho area.
Sorry for the inconvenience,
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