SU-8

arvind sundaramurthy arvisun at stanford.edu
Wed Jun 16 16:36:59 PDT 2004


hi,
I would like to know if someone has any experience/information about thinning down SU-8 negative resist and spinning it on to a thickness less than ~100nm.

I would appreciate any assistance on this subject.

Thanks,

arvind

Arvind Sundaramurthy
Ph.D. Candidate,
Dept. of Electrical Engg.

Rm #16, Edward.L.Ginzton Lab
650-450-0475
arvisun at stanford.edu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20040616/060a7f92/attachment.html>


More information about the labmembers mailing list