Question about TiN, TaN, Ti3N

Woong Kim wkim at
Wed Jun 23 18:11:21 PDT 2004

Does anybody know where we can evaporate/sputter TiN, Ti3N or TaN ?

We need about 30 nm thick deposition on SiO2 substrate.
I'd really appreciate it, if anyone let me know where these things can be
done or which group does this kind of metal nitride deposition. Thanks.


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