Question about TiN, TaN, Ti3N (fwd)

Marco Rolandi mrolandi at stanford.edu
Wed Jun 23 21:47:00 PDT 2004


posting for a collegue...

---------- Forwarded message ----------
Date: Wed, 23 Jun 2004 21:22:20 -0700 (PDT)
From: Woong Kim <wkim at stanford.edu>
To: Marco Rolandi <mrolandi at stanford.edu>
Subject: Question about TiN, TaN, Ti3N (fwd)





---------- Forwarded message ----------
Date: Wed, 23 Jun 2004 18:11:21 -0700 (PDT)
From: Woong Kim <wkim at stanford.edu>
To: labmembers at snf.stanford.edu
Subject: Question about TiN, TaN, Ti3N


Does anybody know where we can evaporate/sputter TiN, Ti3N or TaN ?

We need about 30 nm thick deposition on SiO2 substrate.
I'd really appreciate it, if anyone let me know where these things can be
done or which group does this kind of metal nitride deposition. Thanks.

Woong








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