Question about TiN, TaN, Ti3N

Onur Fidaner ofidaner at stanford.edu
Thu Jun 24 09:38:45 PDT 2004


We had the HTE labs sputter TaN for us. They are a small company in Santa 
Clara:
2964 Scott Blvd.
Santa Clara, a 95054
(408) 986-8026

http://www.htelabs.com/


At 06:11 PM 6/23/2004 -0700, Woong Kim wrote:

>Does anybody know where we can evaporate/sputter TiN, Ti3N or TaN ?
>
>We need about 30 nm thick deposition on SiO2 substrate.
>I'd really appreciate it, if anyone let me know where these things can be
>done or which group does this kind of metal nitride deposition. Thanks.
>
>Woong




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