Missing Process Information Book

Nancy Latta latta at snf.stanford.edu
Wed Jun 30 17:10:38 PDT 2004


Folks,

A unknown labmember has unwittingly removed the process information book 
from the tycom near the LPCVD's.area.  The book contains lots of useful 
information about processing in the lab, such as SiH4 and PH3 ratios for 
doped LTO, etchrates for various wet etchants and oxidation charts time 
vs temp.

If you are this unknow person, will you please replace the book.  The 
labmembers in general will thank you.

-Nancy




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