Oxidizing Si --> SiO2, dissolving Si

Vignesh G Shankar vigneshg at stanford.edu
Wed Mar 3 22:05:39 PST 2004

Hi all,

These may be obvious questions... but I do not know much about it, so I 
would appreciate some input.

I have a nanostructure (nanopillars) in Si and I wish to convert this to 
SiO2, without destroying the structure. Any suggestions?

Also, I know that HF dissolves silica. Is there a good solvent for Si?


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