STS etcher installation
rcrane at snf.stanford.edu
Fri Mar 19 10:38:36 PST 2004
There will be minor disruptions in the L109 aisle (Drytek4, STSetch,
EPI, and STSetch2) area during the weeks of March 22 and March 29 while
the new STSetch2 tool is being installed. Aside from two outside workers
occupying the aisle space and a brief interruption (15 min) of STSetch
operation, the work should pose only a minor inconvenience.
Etch community: Good news, the building permits for the new STSetch2
(HRM) tool have arrived. Permitted work will start Monday, March 22 and
should be completed by Friday, April 2. STS will have their installation
engineer on site Monday, April 5 through Friday April 16. From Monday,
April 19 through Friday April 30, basic process qualifying will be done
by J. McVittie and STS. Process transfer may require additional time.
Please see J. McVittie for information concerning process development
More information about the labmembers