ME342-AB MEMS Lab Course Announcement

Mary Tang mtang at
Fri Mar 19 17:18:02 PST 2004

Hi everyone --  Here's a course announcement from Prof. Pruitt:

ME342-AB MEMS Laboratory, 4 units
lecture: Tuesday/Thursday 2:15-4:05
labs: days to be assigned, 8am-12:30pm

This new course focused on the fabrication and project based design,
analysis, and testing of MEMS sensors will be offered in Spring and
Summer quarters. The first quarter of this two part sequence utilizes
the Stanford Nanofabrication Facility for the laboratory sessions to
fabricate piezoresistive force sensors using a predesigned process. The
sensors will be analyzed, tested, and calibrated.  Lectures will survey
associated topics in MEMS. The second quarter provides team based design
projects with defined challenges and applications. The outcomes of the
second quarter should be suitable for conference publications.

Enrollment is limited but multidisciplinary teams are encouraged. If you
are interested, please visit
to download and complete a questionnaire to be turned in at the first
day of class, Tuesday March 30. Course participants and waitlist will be
posted later that evening.

Please check the website or Axess for updated room location information,
we are looking for a larger venue at least for the first lecture. Hope
to see you on the first day!

Beth Pruitt
Assistant Professor
Mechanical Engineering
pruitt at

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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