From mbaran at stanford.edu Wed May 5 08:44:58 2004 From: mbaran at stanford.edu (Maureen Baran) Date: Wed, 5 May 2004 08:44:58 -0700 Subject: Cell Phone found Message-ID: <200405051544.i45FixHT022057@smtp2.Stanford.EDU> There was a cell phone found yesterday near the lab. If you are missing your cell phone, please come over to my cubicle # 41 and be prepared to describe it. Thank you, Maureen Baran -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Wed May 5 09:53:50 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 05 May 2004 09:53:50 -0700 Subject: Talk on "Limits of Optical Lithography" Message-ID: <40991C1E.73767E4A@snf.stanford.edu> Hi everyone -- A message, forwarded on behalf of Prof. Pease: >Date: Wed, 05 May 2004 09:42:17 -0700 >To: group at jump;cislabmembers >From: Fabian Pease >Subject: Limits of optical lithography >Cc: mailto:labmembers at snf.stanford.edu, echen at briontech.com, eisensee at cis >Bcc: robert_Socha at asml.com > >As part of EE317 Dr. Robert Socha of ASM Lithography (the no. 1 supplier >of photolithographic equipment) will be giving two talks on the limits of >optical lithography. One on imaging at very low contrast levels and the >other on immersion lithography.The planned dates and times are 4:00pm to >5:15 pm May 17 and 19. If you are interested in attending please let me >or Sandy know so we can get an apporpriately sized room. >Fabian Pease -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From rcrane at snf.stanford.edu Thu May 6 11:56:33 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 06 May 2004 11:56:33 -0700 Subject: Major loss of chilled water service Message-ID: <409A8A61.2DB0FF34@snf.stanford.edu> All, We are currently experiencing a severe, university-wide, chilled water production problem due to a ruptured pipe in the cogen plant. Building air conditioning services are being turned off throughout the campus. The SNF fab is having temperature control problems with some tools as our process cooling water loop is slowly heating up. Critical work should be delayed or approached with an understanding of the process changes. The fab may lose compressed air sometime tomorrow due to temperature trips at the compressors. CISX labs will experience the same rise in chilled water temperature. Possibly loss of compressed air tomorrow will also affect these labs. I will issue updates as to repair status. Dick Crane Operations Manager Stanford Nanofabrication Facility From rcrane at snf.stanford.edu Thu May 6 17:51:37 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 06 May 2004 17:51:37 -0700 Subject: Chilled water update 1 Message-ID: <409ADD98.ED0A84A0@snf.stanford.edu> All, The chilled water system problem continues, however the system temperature has stabilized. By removing air conditioning loads throughout the campus, the smaller capacity chillers are now able to handle the load. I believe the leak has been repaired. Cooling tower pump motors that were damaged in the tower flood will need to be replaced on Saturday. The chillers should be able to handle normal loads by Saturday night (5/8/04). CIS/CISX building compressed air should not be lost. The office areas may be warmer than usual. In the SNF fab: The Nikons will remain off until Monday. Litho may experience humidity control problems. Diffusion should be fully operational. Thin films should be fully operational. Etchers may experience changes in performance due to higher operating temperatures. In some cases, they may not be adversely affected. Please check your process with a test run if running critical processes. Facilities Operations expects the chilled water system to be back to normal operation Saturday evening or Sunday morning. Thanks, Dick Crane Operations Manager Stanford Nanofabrication Facility From kailash at stanford.edu Thu May 6 18:35:16 2004 From: kailash at stanford.edu (Kailash) Date: Thu, 6 May 2004 18:35:16 -0700 Subject: Fw: Oral Exam Abstract, Kailash Gopalakrishnan on Monday, May 10 Message-ID: <005d01c433d3$8d0d9490$b16240ab@IBM0AE49E2FAA1> ---------------------------------------------------------------------------- --------------------------- University Ph.D. Oral Examination I-MOS and its derivatives for Logic and Memory Kailash Gopalakrishnan kailash at stanford.edu Department of Electrical Engineering Stanford University. 101 Packard Stanford Campus Monday, May 10, 2004 2:30 PM - 3:30 PM (Refreshments served at 2:15 PM) One of the "fundamental" problems in the continued scaling of transistors is the 60 mV/decade thermodynamic limit in the subthreshold slope. Reduction in the transistor threshold voltage with scaling has therefore resulted in a rapid increase in the standby or the static leakage current of the MOSFET. This increase coupled with the traditional doubling of the number of transistors per chip every 2-3 years has led to an exponentially increasing static power dissipation in chips. In this talk, detailed studies on a new kind of transistor, the I-MOS (Impact-ionization MOS) are presented. The I-MOS uses modulation of the avalanche breakdown voltage in a novel gated p-i-n diode structure in order to switch from the OFF state to the ON state and vice versa. Since avalanche breakdown is an abrupt function of the electric field, simulations show that the device has a subthreshold slope much steeper than kT/q (~ 5-10 mV/decade) and therefore many orders of magnitude lower static power with switching speeds comparable to or exceeding CMOS. This talk will also present experimental results obtained with the different I-MOS prototypes. These results verify that the I-MOS exhibits very steep subthreshold slopes (~ 10 mV/decade) and high turn-on and turn-off speeds. Results on recessed channel I-MOS devices and germanium based p-i-n structures that show promise for VDD scaling will also be discussed. I-MOS devices show significant hot carrier effects that cause threshold voltage instability and degradation in the subthreshold slope with repeated measurements. Monte Carlo simulation studies enhanced understanding of the nature of this hot carrier injection mechanism and clarified reasons for the high injection efficiency (I.E. = IG/ID) in the n-channel I-MOS and its band-to-band tunneling derivative. Novel Step Band-to-Band Hot Electron Injection (SBBHE) structures were fabricated that showed extremely high injection efficiencies (10-3) down to VDS=3.5V and thus potential for extremely low programming power . many orders of magnitude better than conventional NOR FLASH memory cells. From rcrane at snf.stanford.edu Mon May 10 07:18:11 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 10 May 2004 07:18:11 -0700 Subject: Chilled water update 2 Message-ID: <409F8F23.4B0F6182@snf.stanford.edu> All, The chilled water system problem has been repaired. As on 5:00pm on Saturday, May 8, the chilled water curtailment has been lifted and all systems are being returned to normal operation. There is adequate cooling tower pumping capacity to satisfy chilled water needs. The chilled water loop temperature has been reduced to normal limits. Thanks, Dick Crane Operations Manager Stanford Nanofabrication Facility From shott at snf.stanford.edu Mon May 10 17:40:35 2004 From: shott at snf.stanford.edu (John Shott) Date: Mon, 10 May 2004 17:40:35 -0700 Subject: Machine upgrade ... Message-ID: SNF Lab Members: As a number of you are aware, we've been experiencing a number of cases recently when Coral appears to be running slowly. In fact, when it appears as if Coral is running slowly, it is actually other things that are loading down the machine that are causing it to run slowly ... and you can help by being careful to shutdown those things that you are not using. This machine has 2GB of main memory ... however, each Star Office session takes 105-110 MB of memory. Each Mozilla session takes 45-50 MB of memory. Each time that you login to a new Sunray (rather than logging in once with a smart card and moving around the lab to it) you use about 50 MB of memory. What really kills us, however, isn't the actual usage ... it's the number of people who leave the lab without logging out and, even worse, the folks that have sessions running on several Sunrays. Earlier today, when things were bogging down, I found that there were a total of 50 Mozilla sessions running ... and I know that there weren't 50 people in the lab. (Note: Coral also takes a lot of memory ... about 80 MB per client because it runs a separate Java Virtual Machine for each client. However, Coral is smart enough to only let you run one Coral client at a time and shuts down the others if you try to start a new one ...) So, use what you need ... but shut things down when you are done using them. Now, that said, we are on the verge of moving the Sunray clients to another, faster machine. This will likely occur first thing in the morning (maybe even tomorrow morning). In general, that should cause few problems ... your password will still work, your files will all be there, etc. Some of you will notice that things look slightly different ... this will be Solaris 9 instead of Solaris 8, but more most purposes, you shouldn't notice much of a difference. If you have any questions, please let me know. Thanks, John -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at snf.stanford.edu Thu May 13 07:59:39 2004 From: shott at snf.stanford.edu (John Shott) Date: Thu, 13 May 2004 07:59:39 -0700 Subject: New system update ... Message-ID: SNF Lab Members: As you know, yesterday we moved to a different machine for running the SunRay thin clients in the lab. I know that many of you encountered problems, particularly during the times when the lab was busy. We've made an initial effort to figure out what was the cause of these problems and have re-configured a couple of things in hopes of eliminating these problems. If you observe these problems again, please contact us ... e-mail sent to coral at snf.stanford.edu is the best way. Please try to describe the problem that you are encountering as well as you can. One other thing that I forgot to mention: if you click the "earth icon" (the one with the red clock hands on it) that is on the left side of the task bar next to the Star Office icon, you will now fire up the mozilla browser. It takes a few seconds to come up, so be patient and don't click it again ... Thanks for your continued support, John -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Thu May 13 10:36:08 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 13 May 2004 10:36:08 -0700 Subject: [Fwd: Optical lithography below 50nm] Message-ID: <40A3B208.DB357365@snf.stanford.edu> -------- Original Message -------- Subject: Optical lithography below 50nm Date: Thu, 13 May 2004 08:44:25 -0700 From: Fabian Pease To: nishi at ee.Stanford.EDU;, mtang at snf.Stanford.EDU, ee317 at stanford.edu;,dutton at gloworm.Stanford.EDU;, libarra at ee.Stanford.EDU CC: ee317 at stanford.edu;, group at jumpjibe.Stanford.EDU I don't believe I have access to the group addresses for ee, cis and IClab. Could you please forward this notice to those groups? Thanks very much. Fabian Optical lithography below 50nm Dr. Robert Socha will be presenting two lectures next week (May 17 and 19) from 4 to 5:15 in Packard 204. Dr. Socha is from ASML the major supplier of lithographic equipment to the IC industry and he is a specialist in extending optical lithography beyond the normally accepted limits. May 17, "Using Immersion Lithography to Extend Optical Lithography to the Sub-50nm Regime" May 19, "Using Resolution Enhancement Techniques to Extend Optical Lithography to Half-Wavelength-Sized Features in Production " Fabian Pease -------------- next part -------------- An HTML attachment was scrubbed... URL: From pruitt at stanford.edu Thu May 13 12:15:19 2004 From: pruitt at stanford.edu (Beth Pruitt) Date: Thu, 13 May 2004 12:15:19 -0700 Subject: Luke Lee lecture, today 2:15pm Message-ID: Prof. Luke Lee of UC Berkeley Bioengineering will be speaking today at 2:15 in Herrin T175 (ground floor of biology library building). His group works on BioMEMS and BioPoems (Biomedical Polymer Opto Electro Mechanical Systems). you are invited to attend. From izuleta at stanford.edu Thu May 13 19:07:50 2004 From: izuleta at stanford.edu (Ignacio A. Zuleta) Date: Thu, 13 May 2004 19:07:50 -0700 Subject: FW: teflon boat for pieces, help! Message-ID: <200405140207.i4E27stl030192@smtp2.Stanford.EDU> Dear Labmates, My wafer broke and I need to do a 'pad' etch and metal clean @ wbmetal to the pieces. Does anyone have a SEMICLEAN TEFLON?BOAT/BASKET I can borrow for half a day so I can keep my pieces into the right cleanliness track? Thanks a lot! Ignacio ----------------------------------- Chemistry Department Stanford University 333 Campus Drive Stanford, CA 94305 (650)723-4332 (office) (650)725-0259 (fax) ----------------------------------- ? From alan.m.myers at intel.com Fri May 14 08:35:35 2004 From: alan.m.myers at intel.com (Myers, Alan M) Date: Fri, 14 May 2004 08:35:35 -0700 Subject: Intel Job Opportunities Message-ID: <8A3152FDE2948B42AECCF93BFFA130EC02601C04@scsmsx401.sc.intel.com> Dear Lab Members, Intel will be here next Tuesday and Wednesday recruiting recent and soon-to-be PhD candidates for employment in their process development fab. Please see the enclosed attachment for details. Also feel free to pass this on to friends who may not be on this mailing list, but meet the requirements listed in the PowerPoint presentation. Finally, please direct all questions to the contact listed on the presentation. Alan <> -------------- next part -------------- A non-text attachment was scrubbed... Name: Intel PhD employment forum.ppt Type: application/vnd.ms-powerpoint Size: 350720 bytes Desc: Intel PhD employment forum.ppt URL: From ben.jian at arrayedfiberoptics.com Sat May 15 00:28:32 2004 From: ben.jian at arrayedfiberoptics.com (ben.jian) Date: Sat, 15 May 2004 00:28:32 Subject: Question on patterning Pyrex wafer Message-ID: <20040515002832.654.qmail@server266.com> Dear labmembers, We need to pattern Pyrex wafers. The etch profile of the trench should be isotropic and about 30um wide by 6um deep. In other words, we want to have a trench that's round on the bottom instead of a trench with vertical sidewalls. It seems to me wet etching is the way to go. Does anyone know what kind of etch mask and etchant are needed? We also need to protect the backside of Pyrex wafer during this etch. Thanks. Ben Jian -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Tue May 18 12:17:28 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 18 May 2004 12:17:28 -0700 Subject: Fire alarm Message-ID: <40AA6147.F5EA1763@snf.stanford.edu> All, We experienced a fire alarm this morning, May 18, around 1045, which caused the SNF lab, CIS, and CISX buildings to be evacuated. The alarm was set via a "Fire Alarm Pull Box" in response to a smoking, electrical fault in a "daisy chained, extension cord/plug strip combination. The tired plug/cord socket connection overheated causing local smoke and minor damage to the carpet and the wall. Luckily the problem was noticed immediately by the occupant of the area. Connecting extension cords together to make longer cords (daisy chaining), connecting a plug strip to an extension cord (daisy chaining), plugging an extension cord into a plug strip (daisy chaining), or using an extension cord for permanent use can be a fire hazard and is not allowed under the Uniform Fire Code rules. Ironically, the Fire Marshall has just completed a fire safety inspection of CIS building looking for this type of violation. We had seven violations of this type in CIS. CISX will be inspected next month. Members of the CIS/CISX community, please check your office and lab spaces for this type of hazard and correct any problem. The university has approved power strips from TrippLite which come in various cord and strip lengths (www.tripplite.com). See David Conrod (Fire Marshall's Office) at dconrod at stanford.edu for additional information. Thanks, Dick Crane Building Manager From kaima at stanford.edu Tue May 18 13:14:39 2004 From: kaima at stanford.edu (Kai Ma) Date: Tue, 18 May 2004 13:14:39 -0700 (PDT) Subject: EBIC measurement In-Reply-To: Message-ID: Dear fellow labmembers, I hope to do some EBIC measurements. Does anybody know where I can find a company or other kind of institution that has this service? Thank you very much for any informaiton! Kai From zappe at stanford.edu Tue May 25 13:35:29 2004 From: zappe at stanford.edu (Stefan Zappe) Date: Tue, 25 May 2004 13:35:29 -0700 Subject: Wafers with different doping levels Message-ID: <5.1.0.14.2.20040524205057.03212570@zappe.pobox.stanford.edu> Hi, I am looking for 4 inch Silicon and SOI wafers (single or double side polished) with extreme doping levels (n-type and p-type). Resistivity should ideally be either < 0.1 Ohm cm or > 100 Ohm cm (FZ material ?). SOI could also be in the 1- 20 Ohm cm range, device layer >45 um <100um, handle wafer ideally > 500 -1000 um. I just need 2 wafers per type and companies require often to buy more wafers at a time. Has anyone spare wafers I could buy ? Thanks, Stefan From yy7343 at hotmail.com Wed May 26 09:00:08 2004 From: yy7343 at hotmail.com (Yahong Yao) Date: Wed, 26 May 2004 09:00:08 -0700 Subject: ZnO deposition Message-ID: Dear Labmembers, I found ZnO in the SNF web site: http://snf.stanford.edu/Materials/ChemFiles/ZnO2.html. But I can't find which tool to deposit it. Can anyone tell me where to do the deposition? Thank you very much for your input. Regards, Yahong Yao _________________________________________________________________ FREE pop-up blocking with the new MSN Toolbar ? get it now! http://toolbar.msn.click-url.com/go/onm00200415ave/direct/01/ From vlordi at stanford.edu Fri May 28 13:02:29 2004 From: vlordi at stanford.edu (Vincenzo Lordi) Date: Fri, 28 May 2004 13:02:29 -0700 Subject: University Oral Examination - Vincenzo Lordi (June 8, 3:30pm) Message-ID: University Oral Examination Vincenzo Lordi Department of Materials Science and Engineering Stanford University Tuesday, June 8, 2004 3:30pm (Refreshments will be served at 3:15pm) CIS-X Auditorium "Band Edge Optical Properties of GaInNAs(Sb) and the Relation to Atomic Structure" Lasers, detectors, and electroabsorption modulators operating in the telecommunications wavelength range of 1300-1600 nm are important not only for optical fiber communications, but also for use in optical interconnects to replace the electrical lines limiting the future speed of microelectronics. The design of long wavelength optical interconnects allows lower voltage operation as well as seamless integration with optical networking. The novel dilute nitride III-V alloys, GaInNAs and GaInNAsSb, are promising material systems for realizing quantum-well (QW) optoelectronic devices on GaAs that operate in this wavelength range. We grow these materials using solid-source molecular beam epitaxy (MBE). The luminescent quality of as-grown material is generally poor but is improved by ex situ rapid thermal annealing at 700-800 degC for 1-3 min. However, the improvement in material quality is accompanied by an undesirable blueshift of the wavelength. Understanding the mechanism of this blueshift is critical for reproducible control of the operating wavelength of devices using these materials in the active region. X-ray absorption, electroreflectance, and photoluminescence spectroscopies were used to study a series of transitions near the apparent band edge of the material that correspond to different N-In nearest neighbor configurations. These band-edge states are found to be a dominant contribution to the bandgap blueshift upon annealing. As-grown material contains a random distribution of bonds, which is dominated by N-Ga nearest neighbors, corresponding to a smaller bandgap. Annealing shifts the distribution of bonds toward increased N-In nearest neighbors and a configuration with a larger bandgap that is also more thermodynamically stable. The anneal-induced blueshift of the bandgap saturates after the material has reached equilibrium, as expected, although the luminescent quality of the material can continue to be increased. In addition, the electroabsorption properties of the GaInNAs(Sb) QWs were measured by photocurrent to determine their suitability for use in optical modulators. Spectra taken at room temperature demonstrate very nice quantum confined Stark effect (QCSE) behavior, with sharp exciton peaks having FWHM less than 25 meV. The peak absorption coefficient of fully annealed GaInNAsSb QWs was measured to be close to 35,000 /cm at ~1525 nm wavelength, a value higher than reported for competing materials, while annealed GaInNAs QWs showed peak absorption of ~18,000 /cm at 1250 nm. Analogous to the material's luminescent behavior, thermal annealing was found to increase the absorption coefficient of the QWs while blueshifting the bandgap, employing the mechanism described above. The measured electroabsorption characteristics indicate that optical modulators can be fabricated throughout the 1300-1600 nm wavelength range with performance comparable or superior to competing materials grown on InP substrates. We predict device performance for an asymmetric Fabry-Perot reflection modulator of up to 15-20 dB modulation ratio using less than 3 V swing. -------------- next part -------------- A non-text attachment was scrubbed... Name: % Type: application/applefile Size: 128 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Lordi-Abstract.pdf Type: application/octet-stream Size: 69549 bytes Desc: not available URL: From pruitt at stanford.edu Fri May 28 15:48:06 2004 From: pruitt at stanford.edu (Beth Pruitt) Date: Fri, 28 May 2004 15:48:06 -0700 Subject: ME342 open posters Message-ID: You are invited to the open poster session of ME342A. Projects and solution concepts for ME342B will be presented on the last day of class. 3:30-5pm Thursday, June 3 CIS Lobby please stop by to see what these 6 teams plan to prototype in SNF this summer! -------------- next part -------------- An HTML attachment was scrubbed... URL: From pruitt at stanford.edu Fri May 28 15:52:27 2004 From: pruitt at stanford.edu (Beth Pruitt) Date: Fri, 28 May 2004 15:52:27 -0700 Subject: ME342 open posters Message-ID: You are invited to the open poster session of ME342A. Projects and solution concepts for ME342B will be presented on the last day of class. 3:30-5pm Thursday, June 3 CIS Lobby please stop by to see what these 6 teams plan to prototype in SNF this summer! -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Fri May 28 16:27:20 2004 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 28 May 2004 16:27:20 -0700 Subject: Chemical use this weekend Message-ID: <40B7CAD8.37D1F6B2@snf.stanford.edu> Labmembers, Please help the next wet bench user have enough chemicals this long weekend. We are starting a three day weekend so chemical supplies may run low by Monday night. Please observe the recommended bath changing schedules and we should be OK. If you must change a bath, please check for an adequate supply of refill chemicals before dumping. Litho area: developer and photoresist refill supplies are in the yellow storage cabinet. Thanks for your help and have a good Memorial Day weekend, Dick