Anisotropically Etching Ti

Vignesh G vigneshg at
Fri Nov 5 11:11:35 PST 2004


A few months ago I had sent an email asking if anyone knew about etching 
TiO2. In response to that I received a reply suggesting that I should try 
etching Ti and then oxidizing it. At that time I did not have the 
capability of trying that out, but now I do. Essentially, I am now looking 
for ways to anisotropically dry etch Ti (using a hard oxide such as Al2O3 
as a mask). Any information on this would be appreciated. For e.g., would 
sputter etching work... etc.? Thanks.

- Vignesh.

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