Toxic gases (including SiH4, GeH4, DCS, PH3, AsH3, and B2H6) have been restored ....
shott at snf.stanford.edu
Wed Oct 20 06:35:01 PDT 2004
SNF Lab Members:
The fault condition on the exhaust fan in the toxic gas vault has been
cleared and all of the above mentioned toxic gases have been restored as
of 6:30 a.m. this morning.
We are working with O&M (campus operations and maintenance) to adress
the failed fan or sensor that triggered this condition. In the meantime
you may resume normal usage of the STS pecvd, epi reactor, and LPCVD
tools .... subject, of course, to their normal individual shutdown and
Based on a study of the alarm history, it appears as if the fan alarm
likely shutdown the gas cylinders at 00:48 a.m. on Wednesday morning
(that is shortly after midnight on Tuesday night) and those gases would
have been off until they were restored to service at 6:30 a.m. this
morning. Anyone using tools with these gases overnight should carefully
check their deposition thicknesses.
Thank you for your continued support,
More information about the labmembers