Toxic gases (including SiH4, GeH4, DCS, PH3, AsH3, and B2H6) have been restored ....

John Shott shott at snf.stanford.edu
Wed Oct 20 06:35:01 PDT 2004


SNF Lab Members:

The fault condition on the exhaust fan in the toxic gas vault has been 
cleared and all of the above mentioned toxic gases have been restored as 
of 6:30 a.m. this morning.

We are working with O&M (campus operations and maintenance) to adress 
the failed fan or sensor that triggered this condition.  In the meantime 
you may resume normal usage of the STS pecvd, epi reactor, and LPCVD 
tools .... subject, of course, to their normal individual shutdown and 
problems states.

Based on a study of the alarm history, it appears as if the fan alarm 
likely shutdown the gas cylinders at 00:48 a.m. on Wednesday morning 
(that is shortly after midnight on Tuesday night) and those gases would 
have been off until they were restored to service at 6:30 a.m. this 
morning.  Anyone using tools with these gases overnight should carefully 
check their deposition thicknesses.

Thank you for your continued support,

John




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