WB silicide Move
tberg at snf.stanford.edu
Mon Sep 27 09:42:32 PDT 2004
As part of the move to 6" capability the WBsilicide wet bench will
be moved in approximately 2 weeks. This will allow bank 4 to be moved
out and the other Thermco bank to be moved in WBsilicide will be down
for approximately 2 weeks assuming permit issues are satisfied. Please
let Dick Crane or myself know if there are any problems or issues.
Process is working on an alternative clean area while this happens.
More information about the labmembers