Thin poly film structure

Jen-Shiang Wang jenwang at stanford.edu
Thu Apr 21 15:18:57 PDT 2005


Hi,

Does anyone have exerience with making mechanical structures (MEMS) 
with a poly thin film with a submicon (<500nm) thickness at SNF?
If you do have experience, do you have info on grain and stress issues?
Any infomation is appreciated.

Thanks,
Jen-Shiang



More information about the labmembers mailing list