very deep etching of fused silica

ben.jian ben.jian at
Tue Feb 1 01:49:42 PST 2005


We are trying to etch microlenses on fused silica wafer. The height of the microlens is very large - 100 micron tall. The diameter of the microlens is also large - 3.8mm. We think this is definitely not doable at SNF. Does anyone know where we can go to etch such a tall microlens in fused silica? Thanks.


More information about the labmembers mailing list