Does anyone know about an Ar+ plasma tool?

Julia R. Greer jrosolov at alum.mit.edu
Tue Feb 1 12:46:29 PST 2005


Hello fellow labmembers,

I was wondering if anyone knows of any low-energy Ar+ plasma tool on campus. I
just need to sputter some surface damage off of my gold samples, so if there is
such a  tool available somewhere, I would really appreciate it!

Thank you!

Julia R. Greer
Ph.D. Candidate in Materials Science and Engineering
Stanford University
(415) 26-JULES






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