SrTiO3 Etch

Choongho Yu choonghoyu at mail.utexas.edu
Wed Feb 2 00:01:36 PST 2005


Hello SNF labmembers,

Does anyone know receipes for SrTiO3 etch?  I prefer dry etch.
Thank you in advance.

CY



More information about the labmembers mailing list