question about headway manual resist coater.

Harshal Surangalikar harshal at
Thu Feb 10 11:59:08 PST 2005

hello labmembers,

I wanted to coat a wafer with a thick resist, 50 um, and then develop it
with a soft bake to get features with about 1:1 aspect ratio. I wanted to
know if anyone has used a ready recipe for such a coat, or if anyone has
done such a process.

thanks for your help.

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