xzhuang at stanford.edu
Mon Feb 28 17:03:55 PST 2005
I'm just wondering if anyone has experience with using polyimide as adhesive to bond two wafers? I'm trying to find a solution to bond a silicon wafer to a quartz carrier wafer and then etch deep trenches on the exposed side of the silicon wafer. I will separate the quartz and the silicon after dicing the wafer. So the bonding is temporary and yet should have good uniformity. Any input will be highly appreciated!
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