polyimide adhesive

Steve Zhuang xzhuang at stanford.edu
Mon Feb 28 17:03:55 PST 2005

Hi all,


I'm just wondering if anyone has experience with using polyimide as adhesive to bond two wafers? I'm trying to find a solution to bond a silicon wafer to a quartz carrier wafer and then etch deep trenches on the exposed side of the silicon wafer. I will separate the quartz and the silicon after dicing the wafer. So the bonding is temporary and yet should have good uniformity. Any input will be highly appreciated!




Steve Zhuang

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20050228/a300a81f/attachment.html>

More information about the labmembers mailing list