polyimide adhesive

Steve Zhuang xzhuang at stanford.edu
Mon Feb 28 17:03:55 PST 2005


Hi all,

 

I'm just wondering if anyone has experience with using polyimide as adhesive to bond two wafers? I'm trying to find a solution to bond a silicon wafer to a quartz carrier wafer and then etch deep trenches on the exposed side of the silicon wafer. I will separate the quartz and the silicon after dicing the wafer. So the bonding is temporary and yet should have good uniformity. Any input will be highly appreciated!

 

Thanks!

 

Steve Zhuang

 
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