From rcrane at snf.stanford.edu Mon Jan 3 16:07:39 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 03 Jan 2005 16:07:39 -0800 Subject: The fab is open for processing Message-ID: <41D9DE4B.1FEB3B5B@snf.stanford.edu> SNF fab users: January 3, 2005, 1600hrs. The fab is now open for use. Not all tools have been requalified and may need a test run before use. Please check Coral for current status. Happy processing, Dick From shott at snf.stanford.edu Mon Jan 3 22:05:31 2005 From: shott at snf.stanford.edu (John Shott) Date: Mon, 03 Jan 2005 22:05:31 -0800 Subject: Coral Reporting Capabilities .... Message-ID: <41DA322B.2080401@snf.stanford.edu> An HTML attachment was scrubbed... URL: From shott at snf.stanford.edu Mon Jan 3 22:19:11 2005 From: shott at snf.stanford.edu (John Shott) Date: Mon, 03 Jan 2005 22:19:11 -0800 Subject: Resetting your Remote Coral password to access xReporter .... Message-ID: <41DA355F.5040709@snf.stanford.edu> An HTML attachment was scrubbed... URL: From chernand at chem.ucla.edu Tue Jan 4 11:00:07 2005 From: chernand at chem.ucla.edu (Carlos Hernandez) Date: Tue, 04 Jan 2005 11:00:07 -0800 Subject: AZ Photoresist Message-ID: <6.0.0.22.2.20050104105931.01a7a480@gradmail.chem.ucla.edu> Hi I was wondering if anybody has purchased or uses AZ100nXT photoresist. I was would like to borrow just a few milliliters to test before purchasing a quart of it. Thanks, Carlos From mtang at snf.stanford.edu Wed Jan 5 09:53:10 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 05 Jan 2005 09:53:10 -0800 Subject: Coral Report Engine problems.... Message-ID: <41DC2986.5030000@snf.stanford.edu> Labmembers: Many of you have reported problems with getting access to the Coral Report Engine. It seems apparent that there are some technical problems with the permissions. Be assured that the Coral Development Team is working on this as best as they can. Everyone will be informed once these issues are worked out; but in the meantime, please understand that access to XReporter is unpredictable... Our sincerest apologies... Many thanks to those of you who reported these problems ? the symptoms you describe are proving to be helpful in diagnosing the problem. Your SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jerabek at snf.stanford.edu Wed Jan 5 12:59:51 2005 From: jerabek at snf.stanford.edu (Paul Jerabek) Date: Wed, 5 Jan 2005 12:59:51 -0800 (PST) Subject: mask laser writer Message-ID: To whom it may concern: Micronic laser writer stage tracking problem has been fixed. I have written 5 masks so far and everything looks O.K. -Paul From guerra at par.stanford.edu Thu Jan 6 10:49:27 2005 From: guerra at par.stanford.edu (Ann Guerra) Date: Thu, 6 Jan 2005 10:49:27 -0800 (PST) Subject: EE310 Integrated Circuits Seminar 1/11/05 Bob Jewett, Agilent Message-ID: EE310 Integrated Circuits Technology and Design Seminar "A 1.2GSa/s 15-bit DAC for Wideband Signal Generation" Bob Jewett Agilent Technologies Tuesday, January 11, 2005 4:15 p.m. Building 380, Room 380Y ABSTRACT Agilent Labs has designed a very fast, precise digital-to-analog converter for wideband signal generation in test equipment, which requires both a high data rate and low spurious signals. This talk will discuss design, testing, troubleshooting, and redesign of the DAC. BIOGRAPHY Bob Jewett (S'79-M'83) received the B.S.E.E. and M.S.E.E. degrees from the University of California at Berkeley in 1975 and 1979, respectively. His graduate research was on Josephson-junction-based analog-to-digital converters. From 1968 to 1972, he worked on radar and other weather equipment in the U.S. Air Force. From 1975 to 1979, he worked for Hewlett-Packard in Santa Rosa, CA, on microwave frequency synthesis products and holds one patent for a YIG-tuned frequency multiplier circuit. In 1983, he was a visiting researcher at the Institut d'Electronique Fondamentale in Orsay, France, where he worked on a simulator for superconducting electronics. In 1984, he joined the High Speed Electronics Department of Hewlett-Packard Laboratories (now Agilent Labs) in Palo Alto, CA, where he has primarily worked on bipolar analog-to-digital and digital-to-analog converters, for which he has received two patents. Mr. Jewett has been a member of the ISSCC Analog Subcommittee and was a guest editor for the JSSC. He is a lecturer for the courses organized by MEAD Microelectronics. From mtang at snf.stanford.edu Thu Jan 6 13:47:05 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 06 Jan 2005 13:47:05 -0800 Subject: EE410 is here! Message-ID: <41DDB1D9.6000000@snf.stanford.edu> Greetings Labmembers: It's that time of year again, when the days begin to get longer and the bulbs start sending shoots up through the ground... and the EE410 students suddenly converge on the lab. For those of you who don't know, EE410 is a very challenging and interesting class in which the students fabricate, model, and test a CMOS device (for more info, check out the class website at http://www.stanford.edu/class/ee410). The schedule for processing this device is aggressive -- and we ask for your patience over the next 8 weeks as priorities and equipment access may be shifted in order to allow full support for this class. You may see some wide-eyed and possibly scared looking students in the lab, who are learning and doing some of their own processing during their lab sessions. The schedule for the lab sections will be posted on the calendar outside the gowning room. If you have any questions about EE410, please contact Gladys (the lead coordinator for the lab portion of this class -- she's at gladys at snf.stanford.edu). Thanks for your attention -- The SNF Staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jperez at snf.stanford.edu Wed Jan 12 16:17:13 2005 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Wed, 12 Jan 2005 16:17:13 -0800 Subject: Metalica Gold target missing Message-ID: <41E5BE09.1000101@snf.stanford.edu> Hello, The new Gold target for Metalica _isn't_ in its box. The Chromium target is also missing. Did anyone pick them up or seen them lying around? Jeannie From vlordi at stanford.edu Thu Jan 13 13:30:38 2005 From: vlordi at stanford.edu (Vincenzo Lordi) Date: Thu, 13 Jan 2005 13:30:38 -0800 Subject: metal coated scrap wafers Message-ID: <1105651838.41e6e87e69f3d@webmail.stanford.edu> Hi. I'm wondering if anyone might have some scrap wafers (or pieces) with metal coatings on them. Pretty much any metal would be fine. It would be preferable to have the metal on a conducting substrate, but otherwise the structure is not important. Thanks, -Vince From han-jun.kim at hp.com Thu Jan 13 18:28:15 2005 From: han-jun.kim at hp.com (Kim, Han-Jun) Date: Thu, 13 Jan 2005 18:28:15 -0800 Subject: dry etching ZnO Message-ID: <6C21311CEE34E049B74CC0EF339464B9035248@cacexc12.americas.cpqcorp.net> Dear staff and fellow members of SNF, I'm wondering if anyone is experienced in dry etching ZnO at the lab. Any input about the equipment and recipe used will be greatly helpful and appreciated! Thank you! Regards, Hanj-Jun ============================= Han-Jun Kim Hewlett-Packard Lab. 1501 Page Mill Rd, MS 1198 Palo Alto, CA 94304 (650) 857-8525 / 8948 FAX hjkim at hpl.hp.com ============================= -------------- next part -------------- An HTML attachment was scrubbed... URL: From shiwei20012002 at yahoo.com Thu Jan 13 20:18:50 2005 From: shiwei20012002 at yahoo.com (Wei Shi) Date: Thu, 13 Jan 2005 20:18:50 -0800 (PST) Subject: venders for special glass Message-ID: <20050114041850.62516.qmail@web21202.mail.yahoo.com> Does any buddy has vender information for glass? I want to buy glass with different physical properties like thermal conductivities, coefficient of thermal expansion, heat capacity, Young's modulus, etc.? Thanks, Wei --------------------------------- Do you Yahoo!? Meet the all-new My Yahoo! ? Try it today! -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Fri Jan 14 07:46:59 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Fri, 14 Jan 2005 07:46:59 -0800 Subject: venders for special glass In-Reply-To: <20050114041850.62516.qmail@web21202.mail.yahoo.com> References: <20050114041850.62516.qmail@web21202.mail.yahoo.com> Message-ID: <41E7E973.806@snf.stanford.edu> Hi Wei -- Way back when I used to do labwork, my vendor of choice was Precision Glass and Optics (http://www.pgo.com). Their website has specs on all sort of laboratory glass. They will also do custom machine work. And they have good prices for Borofloat. There are a number of other sources, which are listed on the SNF website: http://snf.stanford.edu/Process/Resources/Glass.html If you (or anyone else) finds other sources that you're willing to share, please let me know so I can add them to the list. Mary Wei Shi wrote: > Does any buddy has vender information for glass? I want to buy glass > with different physical properties like thermal conductivities, > coefficient of thermal expansion, heat capacity, Young's modulus, etc.? > Thanks, > Wei > > ------------------------------------------------------------------------ > Do you Yahoo!? > Meet the all-new My Yahoo! ? Try it today! -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From shide_cheng at hotmail.com Mon Jan 17 09:24:43 2005 From: shide_cheng at hotmail.com (shide_cheng) Date: Mon, 17 Jan 2005 09:24:43 -0800 Subject: venders for special glass References: <20050114041850.62516.qmail@web21202.mail.yahoo.com> Message-ID: Wei, Have you tried Corning? SD ----- Original Message ----- From: Wei Shi To: labmembers at snf.stanford.edu Sent: Thursday, January 13, 2005 8:18 PM Subject: venders for special glass Does any buddy has vender information for glass? I want to buy glass with different physical properties like thermal conductivities, coefficient of thermal expansion, heat capacity, Young's modulus, etc.? Thanks, Wei ------------------------------------------------------------------------------ Do you Yahoo!? Meet the all-new My Yahoo! - Try it today! -------------- next part -------------- An HTML attachment was scrubbed... URL: From miglazer at sbcglobal.net Mon Jan 17 09:38:33 2005 From: miglazer at sbcglobal.net (Marc Glazer) Date: Mon, 17 Jan 2005 09:38:33 -0800 (PST) Subject: venders for special glass In-Reply-To: Message-ID: <20050117173833.22089.qmail@web81005.mail.yahoo.com> Also try Schott. shide_cheng wrote:Wei, Have you tried Corning? SD ----- Original Message ----- From: Wei Shi To: labmembers at snf.stanford.edu Sent: Thursday, January 13, 2005 8:18 PM Subject: venders for special glass Does any buddy has vender information for glass? I want to buy glass with different physical properties like thermal conductivities, coefficient of thermal expansion, heat capacity, Young's modulus, etc.? Thanks, Wei --------------------------------- Do you Yahoo!? Meet the all-new My Yahoo! ? Try it today! -------------- next part -------------- An HTML attachment was scrubbed... URL: From ben.jian at arrayedfiberoptics.com Mon Jan 17 18:00:27 2005 From: ben.jian at arrayedfiberoptics.com (ben.jian) Date: Mon, 17 Jan 2005 18:00:27 Subject: borofloat glass refractive index at 1.55um Message-ID: <20050117180027.30410.qmail@server266.com> Hi, I am trying to determine the refractive index of borofloat glass at 1.55um and 1.3um. I contacted Schott but their measurement only went to 1.1um. Does anyone know the refractive index at these two wavelengths, or can point me to a place where precise measurement can be done on my wafer at these two wavelengths? Thanks a lot! Ben From mtang at snf.stanford.edu Mon Jan 17 11:26:16 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 17 Jan 2005 11:26:16 -0800 Subject: Coventor Seminar Message-ID: <41EC1158.8050806@snf.stanford.edu> Greetings labmembers: With thanks to Dan Grupp, Coventor has agreed to present a technical seminar on their latest MEMS CAD design tools. Coventor provides what has become the standard MEMS design and modeling tools for industry (and for that matter, academic labs as well). Even if your fluidic channel device is simple in layout, you can use Coventor tools can be used to model the fluid behavior. Their new product line, we've been told, includes the capability to display a graphic cross-section at any point of your modeled device. For more information, check out the seminar or contact Benjamin Blackwell at benjamin.blackwell at coventor.com ********************************************************************* Date: January 26, 2005 Time: 10 am Location: CIS 101 (Conference room, not auditorium.) Presenters: Nelsimar Vandelli, Product Engineer; Benjamin Blackwell, Director U.S. Sales CoventorWare^TM and MEMulator^TM : Design Methodology for MEMS Applications The successful development of MEMS based products usually leverages a variety of design tools capable of modeling and simulating not only device behavior but also fabrication processes. These tools are based on conventional numerical methods such as finite-elements, boundary-elements, finite volumes and volume of fluids and provide the means to conduct very detailed analyses. However, they are still very limited for rapid device and process design due to the domain discretization requirements and long simulation times, characteristic of device coupled-physics and process physics-chemistry. As a result, designers are limited to the analysis of devices and individual processing steps that are just a small part of a larger system and a multi-layer process sequence respectively. Coventor, Inc has developed two products to address some of these limitations. In this presentation, we will review CoventorWare and MEMulator in details and present examples illustrating how these design tools can be used to create effective MEMS design methodologies. Snacks will be provided. -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From sdkim at stanford.edu Tue Jan 18 20:26:04 2005 From: sdkim at stanford.edu (Kim, Seungduck) Date: Tue, 18 Jan 2005 20:26:04 -0800 Subject: Copper Selective Etchent? In-Reply-To: <41EC1158.8050806@snf.stanford.edu> References: <41EC1158.8050806@snf.stanford.edu> Message-ID: <1106108764.41ede15c7efa9@webmail.stanford.edu> Dear Lab members, I am looking for a copper selective etchent. I have double layered structure with copper (250A) and thick Ni electroplated layer(100um). I would like to etch only the copper away and leave Ni intact. Is there any etchent in CIS that can do this or is there anyone who has experience with this? Thank you. From guerra at par.stanford.edu Thu Jan 20 15:49:34 2005 From: guerra at par.stanford.edu (Ann Guerra) Date: Thu, 20 Jan 2005 15:49:34 -0800 (PST) Subject: EE310 Integrated Circuits Seminar, 1/25/05 Message-ID: EE310 Integrated Circuits Technology and Design Seminar "Thermal Noise and Distortion Considerations for a Voltage Controlled Amplifier" Ron Quan Tuesday, January 25, 2005 4:15 p.m. Building 380, Room 380Y ABSTRACT In a differential pair amplifier, which is commonly used in voltage-controlled amplifiers, mixers, or analog multipliers, a major source of noise is identified. Two ways of lowering the output noise are examined and it is determined that the use of nonlinear local feedback elements is the best approach to lower noise while maintaining low distortion performance. An intuitive example is given to explain why linear local feedback elements increase distortion. Finally, it is concluded that distortion is further reduced by paralleling a plurality of nonlinear local feedback elements. From vlordi at stanford.edu Mon Jan 24 18:46:46 2005 From: vlordi at stanford.edu (Vincenzo Lordi) Date: Mon, 24 Jan 2005 18:46:46 -0800 Subject: Ar+ sputter etching Au on AlGaAs Message-ID: Hi. I am wondering if anyone has any experience in using an Ar+ sputter etch to etch Au lines using e-beam patterned photoresist. I need to etch lines ranging from 40nm to 100nm in width and 20nm deep into Au that is deposited on top of AlGaAs, preferably through an e-beam defined photoresist mask. Any information would be useful, even if your experience is not directly with Au. Typical conditions and etch rates of metal vs. photoresist would be helpful, as well as suggestions to point me in the right direction to work out this process. Thanks, -Vince From mtang at snf.stanford.edu Tue Jan 25 07:58:07 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 25 Jan 2005 07:58:07 -0800 Subject: Reminder: Coventor MEMS CAD Seminar Wednesday Message-ID: <41F66C8F.90401@snf.stanford.edu> Hi everyone -- Just a reminder for those interested: Coventor is presenting a technical seminar on MEMS design tools Wednesday at 10 am in CIS 101. The original announcement is appended below. *********************************************************************** Greetings labmembers: With thanks to Dan Grupp, Coventor has agreed to present a technical seminar on their latest MEMS CAD design tools. Coventor provides what has become the standard MEMS design and modeling tools for industry (and for that matter, academic labs as well). Even if your fluidic channel device is simple in layout, you can use Coventor tools can be used to model the fluid behavior. Their new product line, we've been told, includes the capability to display a graphic cross-section at any point of your modeled device. For more information, check out the seminar or contact Benjamin Blackwell at benjamin.blackwell at coventor.com ********************************************************************* Date: January 26, 2005 Time: 10 am Location: CIS 101 (Conference room, not auditorium.) Presenters: Nelsimar Vandelli, Product Engineer; Benjamin Blackwell, Director U.S. Sales CoventorWare^TM and MEMulator^TM : Design Methodology for MEMS Applications The successful development of MEMS based products usually leverages a variety of design tools capable of modeling and simulating not only device behavior but also fabrication processes. These tools are based on conventional numerical methods such as finite-elements, boundary-elements, finite volumes and volume of fluids and provide the means to conduct very detailed analyses. However, they are still very limited for rapid device and process design due to the domain discretization requirements and long simulation times, characteristic of device coupled-physics and process physics-chemistry. As a result, designers are limited to the analysis of devices and individual processing steps that are just a small part of a larger system and a multi-layer process sequence respectively. Coventor, Inc has developed two products to address some of these limitations. In this presentation, we will review CoventorWare and MEMulator in details and present examples illustrating how these design tools can be used to create effective MEMS design methodologies. Snacks will be provided. -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at snf.stanford.edu Tue Jan 25 11:42:34 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Tue, 25 Jan 2005 11:42:34 -0800 Subject: Digital scale doing the walkabout? Message-ID: <41F6A12A.9060508@snf.stanford.edu> Hi all -- Sorry for the broadcast message. We're missing a small, digital scale/balance used for weighing things to 0.1 g accuracy. This usually resides in the wafersaw room. If you've borrowed it, could you please return it? Thanks, Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From guerra at par.stanford.edu Tue Jan 25 15:57:12 2005 From: guerra at par.stanford.edu (Ann Guerra) Date: Tue, 25 Jan 2005 15:57:12 -0800 (PST) Subject: Special Seminar - Leuven, Belgium 2/1/05; MICAS & RF pwr amps Message-ID: SPECIAL SEMINAR: MICAS Research Activities TUESDAY, FEBRUARY 1, 2005 CIS-101 1:30 p.m. Presented by: Patrick Reynaert of Professor Steyaert's group University of Leuven, Belgium ------------------------------- First, the presentation will give an overview of the research activities at MICAS (Microelectronics and Sensors). The different groups within MICAS will be presented, followed by a discussion of the technical facilities (packaging, bonding, ..) and an overview of the measurement laboratory. Then the presentation will focus on the design of RF CMOS Power Amplifiers. The different trade-offs and challenges in deep sub-micron are discussed. These ideas are then applied on the design of a Polar Modulated 0.18um PA. Starting from the ETSI specifications, the design flow of the amplifier is clarified. Finally, the packaging process, measurement set-up and measurements of this amplifier are discussed. -------------------------------- FOLLOWING THE PRESENTATION, he will be available for open discussion. ir. ing. Patrick Reynaert Teaching Assistant KULeuven ESAT-MICAS (91.22) Kasteelpark Arenberg 10 B-3001 Leuven, Belgium http://www.esat.kuleuven.ac.be/micas/ -------------------------------------------- From mtang at snf.stanford.edu Wed Jan 26 07:41:59 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 26 Jan 2005 07:41:59 -0800 Subject: Forgot to disable a tool? - How to correct this... Message-ID: <41F7BA47.8000308@snf.stanford.edu> Greetings Labmembers: With the new notched cap fee structure, everyone is being a LOT more conscientious about disabling equipment when done -- and this has been really helpful in making equipment more available (and providing more accurate equipment status!) However, there are and, no doubt, will continue to be, occasions where someone forgets to disable something. In order to avoid accounting problems (like, "my boss just looked at the bill, and I know I didn't mean to enable the wafersaw for the entire Labor Day weekend last September") we're asking that everyone take the responsibility to review their usage history on a routine basis (daily) when you are using the lab. If you've forgotten to disable a piece of equipment (or, if someone has neglected to enable over you), you can ask any staff member to make this correction for you, provided your email request is received in time. Here is the procedure: 1. Your request should be made as soon as possible -- send an email to the responsible staff member, requesting the correction. You should list: the equipment name; the starting and ending date/time as it appears on Coral; the actual ending time for your use of the equipment. Please include a sentence explaining your request. If your request is made within 48 hours of the end of the session in question, any staff member can help you. 2. Copy another staff member (me, Paul Rissman, the backup staff person for that equipment), just in case the responsible person is out or unavailable. 3. The correction to your account should be made within three working days. Please take responsibility to check that the correction is made (review your usage history on XReporter) and to follow up with appropriate staff as needed. 4. If your request is made more than 48 hours after the session, there is no guarantee that the correction will be made. If there are extenuating circumstances, you should direct your request to Paul Rissman (and better make it a good one!) 5. If your request comes within a few days of the end of the calendar month, the correction might not be made, even if it is within 48 hours of the session. At the end of every month, the Coral database is uploaded to the Stanford Accounting system, after which corrections CANNOT be easily made. (Again, only divine intervention by Paul Rissman may be able to save you from the charges, at this point.) We, the SNF staff, will try to help you whenever possible, but please understand that you are responsible for enabling/disabling tools under your own account. Please use the XReporter tool to check on your lab usage. Thanks for your attention -- Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From kenney at slac.stanford.edu Wed Jan 26 08:12:05 2005 From: kenney at slac.stanford.edu (Chris Kenney) Date: Wed, 26 Jan 2005 08:12:05 -0800 (PST) Subject: Forgot to disable a tool? - How to correct this... In-Reply-To: <41F7BA47.8000308@snf.stanford.edu> References: <41F7BA47.8000308@snf.stanford.edu> Message-ID: What is Xreporter? How does one check charges? Thanks. On Wed, 26 Jan 2005, Mary Tang wrote: > Greetings Labmembers: > > With the new notched cap fee structure, everyone is being a LOT more > conscientious about disabling equipment when done -- and this has been > really helpful in making equipment more available (and providing more > accurate equipment status!) > > However, there are and, no doubt, will continue to be, occasions where > someone forgets to disable something. In order to avoid accounting > problems (like, "my boss just looked at the bill, and I know I didn't > mean to enable the wafersaw for the entire Labor Day weekend last > September") we're asking that everyone take the responsibility to review > their usage history on a routine basis (daily) when you are using the > lab. If you've forgotten to disable a piece of equipment (or, if > someone has neglected to enable over you), you can ask any staff member > to make this correction for you, provided your email request is received > in time. Here is the procedure: > > 1. Your request should be made as soon as possible -- send an email to > the responsible staff member, requesting the correction. You should > list: the equipment name; the starting and ending date/time as it > appears on Coral; the actual ending time for your use of the equipment. > Please include a sentence explaining your request. If your request is > made within 48 hours of the end of the session in question, any staff > member can help you. > > 2. Copy another staff member (me, Paul Rissman, the backup staff person > for that equipment), just in case the responsible person is out or > unavailable. > > 3. The correction to your account should be made within three working > days. Please take responsibility to check that the correction is made > (review your usage history on XReporter) and to follow up with > appropriate staff as needed. > > 4. If your request is made more than 48 hours after the session, there > is no guarantee that the correction will be made. If there are > extenuating circumstances, you should direct your request to Paul > Rissman (and better make it a good one!) > > 5. If your request comes within a few days of the end of the calendar > month, the correction might not be made, even if it is within 48 hours > of the session. At the end of every month, the Coral database is > uploaded to the Stanford Accounting system, after which corrections > CANNOT be easily made. (Again, only divine intervention by Paul Rissman > may be able to save you from the charges, at this point.) > > We, the SNF staff, will try to help you whenever possible, but please > understand that you are responsible for enabling/disabling tools under > your own account. Please use the XReporter tool to check on your lab > usage. > > Thanks for your attention -- > > > Your SNF staff > > > > -- > Mary X. Tang, Ph.D. > Stanford Nanofabrication Facility > CIS Room 136, Mail Code 4070 > Stanford, CA 94305 > (650)723-9980 > mtang at stanford.edu > http://snf.stanford.edu > > From mtang at snf.stanford.edu Wed Jan 26 08:26:18 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 26 Jan 2005 08:26:18 -0800 Subject: Forgot to disable a tool? - How to correct this... In-Reply-To: References: <41F7BA47.8000308@snf.stanford.edu> Message-ID: <41F7C4AA.6090806@snf.stanford.edu> Wups! Sorry. I meant the Coral Report Engine (http://opencoral.stanford.edu/cocoon/xreporter/en-US/datasources -- This runs under XReporter. John's email describing this can be found here: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:1688:200501:hgiacnpacnjndklddijp.) Thanks for clarifying. M Chris Kenney wrote: >What is Xreporter? > >How does one check charges? > >Thanks. > >On Wed, 26 Jan 2005, Mary Tang wrote: > > > >>Greetings Labmembers: >> >>With the new notched cap fee structure, everyone is being a LOT more >>conscientious about disabling equipment when done -- and this has been >>really helpful in making equipment more available (and providing more >>accurate equipment status!) >> >>However, there are and, no doubt, will continue to be, occasions where >>someone forgets to disable something. In order to avoid accounting >>problems (like, "my boss just looked at the bill, and I know I didn't >>mean to enable the wafersaw for the entire Labor Day weekend last >>September") we're asking that everyone take the responsibility to review >>their usage history on a routine basis (daily) when you are using the >>lab. If you've forgotten to disable a piece of equipment (or, if >>someone has neglected to enable over you), you can ask any staff member >>to make this correction for you, provided your email request is received >>in time. Here is the procedure: >> >>1. Your request should be made as soon as possible -- send an email to >>the responsible staff member, requesting the correction. You should >>list: the equipment name; the starting and ending date/time as it >>appears on Coral; the actual ending time for your use of the equipment. >>Please include a sentence explaining your request. If your request is >>made within 48 hours of the end of the session in question, any staff >>member can help you. >> >>2. Copy another staff member (me, Paul Rissman, the backup staff person >>for that equipment), just in case the responsible person is out or >>unavailable. >> >>3. The correction to your account should be made within three working >>days. Please take responsibility to check that the correction is made >>(review your usage history on XReporter) and to follow up with >>appropriate staff as needed. >> >>4. If your request is made more than 48 hours after the session, there >>is no guarantee that the correction will be made. If there are >>extenuating circumstances, you should direct your request to Paul >>Rissman (and better make it a good one!) >> >>5. If your request comes within a few days of the end of the calendar >>month, the correction might not be made, even if it is within 48 hours >>of the session. At the end of every month, the Coral database is >>uploaded to the Stanford Accounting system, after which corrections >>CANNOT be easily made. (Again, only divine intervention by Paul Rissman >>may be able to save you from the charges, at this point.) >> >>We, the SNF staff, will try to help you whenever possible, but please >>understand that you are responsible for enabling/disabling tools under >>your own account. Please use the XReporter tool to check on your lab >>usage. >> >>Thanks for your attention -- >> >> >>Your SNF staff >> >> >> >>-- >>Mary X. Tang, Ph.D. >>Stanford Nanofabrication Facility >>CIS Room 136, Mail Code 4070 >>Stanford, CA 94305 >>(650)723-9980 >>mtang at stanford.edu >>http://snf.stanford.edu >> >> >> >> -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mbaran at stanford.edu Wed Jan 26 08:51:06 2005 From: mbaran at stanford.edu (Maureen Baran) Date: Wed, 26 Jan 2005 08:51:06 -0800 Subject: Car Keys Found Last Night Message-ID: <200501261651.j0QGp7gS001389@smtp1.Stanford.EDU> A set of car keys were found last night outside the CIS building. The key ring has a green frog on it. If these keys are yours, please come and claim them. I am in cubicle 41 on the 1st floor. Maureen Maureen Baran Stanford Nanofabrication Facility Lab Services Administrator mbaran at stanford.edu 650-725-3664 -------------- next part -------------- An HTML attachment was scrubbed... URL: From grupp at snowmass.Stanford.EDU Wed Jan 26 10:09:37 2005 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Wed, 26 Jan 2005 10:09:37 -0800 (PST) Subject: RIGHT NOW: MEMulator CAD demo in CIS 101 Message-ID: started at 10, but come by anytime. --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 --------------------------------------------------------------------------- From mtang at snf.stanford.edu Wed Jan 26 11:19:25 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 26 Jan 2005 11:19:25 -0800 Subject: "Activities" and the Coral Report Engine... Message-ID: <41F7ED3D.1090308@snf.stanford.edu> Hi everyone -- Sorry, I confused people with the nomeclature in my last email... Please refer to John's original email which describes the entries on the Coral Report Engine (http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:1688:200501:hgiacnpacnjndklddijp) Your lab_activities is just an indication of how long your Coral session was active. You are not charged for this time you spend in the lab. Nor are you charged for reservations. Only equipment activity, staff activities (like training and processing) and stockroom items incur charges. Thanks for your attention, Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From edwardsj at stanford.edu Wed Jan 26 11:53:47 2005 From: edwardsj at stanford.edu (Jane Edwards) Date: Wed, 26 Jan 2005 11:53:47 -0800 Subject: Congratulations: Paul, John, Gladys, Mario, Mahnaz & Mike Message-ID: <002001c503e0$c0035a50$236540ab@AVANDEL> Please join us in thanking Paul, John, Gladys, Mario, Mahnaz and Mike for all their terrific contributions to SNF. Way to go!!! To: hr-deptmanager at lists.Stanford.EDU; soedeansoffice at lists.Stanford.EDU Subject: Annual Service Award Reception The School of Engineering celebrated its Annual Service Award Reception on Tuesday, January 25, 2005 at the Stanford Faculty Club. Dean Jim Plummer along with Senior Associate Dean Eleanor Antonakos presented service award pins and certificates to employees recognizing them for recently completing years of service in 5-year increments. Employees honored at this year's service award reception included: Stanford Nanofabrication Facility - Mahnaz Mansourpour (5), Michael Martinez (5), Eddy Vilanova (10), Gladys Sarmiento (15), John Shott (25), Paul Jerabek (35) Bioengineering - Carolyn Mazenko (5) Center for Integrated Systems - Miho Nishi (5) Chemical Engineering - Pamela Juanes (20) Civil & Environmental Engineering - Racquel Hagen (5) Computer Science - Connie Chan (5), Henny Sipma (5), Andreas Paepcke (10), Jam Kiattinant (15), Marianne Siroker (20), Peche Turner (20) Dean's Office - Kate Barry (5), Beth Curran (5), Linda Faris (5), Marge Kastner (5), Sally Gressens (15), Marie Thompson (15), Bob Wheeler (20) Electrical Engineering - Bernadette David (5), John Mendoza (10), Joice DeBolt (15), Peter Griffin (15), Tiiu Johnson (15), Natasha Newson (15), Sharon Gerlach (20), Irene Sweeney (20) Engineering Research Administration - Sandy Shereman (5), Merci Agustin (10), Leyla Unerdem (15) Management Science & Engineering - Tina Seelig (5), Juanita Winkleman (5), Lorraine Papadakis (10), Lauren Cottle (15), Edith Leni (20) Mechanical Engineering - Tibor Fabian (5), Allison Arnold-Rife (5), Tom Hasler (20) Stanford Center for Professional Development - Gordon Hom (5), Lance Nakagawa (5), Tibor Spoon (5), Les Stout (5), Mary Echevarri (10), Cam Moore (10), Melinda Sterling (25) In addition to the service awards, the School also awarded the 2004 Shah Family Staff Award, which was created by an endowment made by the Haresh C. Shah family in 1995. This award recognizes a staff member who has demonstrated outstanding competence, dedication and accomplishment in the preceding year. The 2004 Shah Family Staff Award was bestowed upon Jamie Willmes (Dean's Office - Finance). ************************************************** Linda S. Faris Human Resources Director Schools of Engineering and Earth Sciences Stanford University Terman Bldg., Room 251 Stanford, CA 94305 Phone: 650-723-3872 Fax : 650-723-3805 -++**=-++**=-++**=-++**=-++**=-++**=-++**= This message was posted through the Stanford campus mailing list server. If you wish to unsubscribe from this mailing list, send the message body of "unsubscribe hr-deptmanager" to majordomo at lists.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Thu Jan 27 15:01:52 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Thu, 27 Jan 2005 15:01:52 -0800 Subject: Future shutdown for furnaces Message-ID: <41F972E0.F59FBCA6@snf.stanford.edu> Fab users, Furnace area disruption alert. The next step to modernize the diffusion furnaces is about to happen. Tylan bank 4 will soon be replaced by Thermco Bank 2. This upgrade will require a shutdown of thermco furnace bank 1 and tylan banks 2, 3, and 4 for three weeks starting around February 28. I believe the three weeks quoted is generous and the actual time may be less. Please plan ahead for your furnace needs. The process group is looking into possible alternative furnace resources. More information concerning these resources and a more definite start date will follow next week. Thanks you for your patience, Dick Details: The Thermco Bank 2 installation requires the bank 1-4 process and house gases to be turned-off and lines purge to allow repositioning of existing gas lines and adding a few new tie-ins. The existing Tylan furnace can not be moved until the gas lines are cut. Since the toxic and house gases are regulated by Santa Clara County Building and Environmental Departments, all work must be tested and inspected according to their timetable. We will complete as much preliminary work as possible prior to shutting down gases. This action will affect the following tubes: (bank1) thermco1, thermco2, thermconitride1, thermcopoly1, (bank2) tylan5 (boron), tylan6 (phosphorous), teos2, tylansige, (bank3) tylanpoly, tylannitride, tylanbpsg, tylanfga, (bank4) tystar, teos. Tylan bank 1, the tylan oxidation furnaces, will not be affected by this action. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at snf.stanford.edu Thu Jan 27 16:00:28 2005 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 27 Jan 2005 16:00:28 -0800 Subject: Announcement of Policy Change: Fees for Lab Bins and Lockers Message-ID: <41F9809C.7010806@snf.stanford.edu> Dear Labmembers ? As many of you know (and maybe all too well), I?m having a real heck of a time keeping on top of the lab storage bins. Maureen likewise has a hard time with lockers. We want to offer sincerest apologies to all, especially new labmembers who have been waiting so patiently... We theoretically have more than enough bins and lockers to allocate to all active labmembers each quarter ? but it?s been really difficult persuading people to give up their bins when their lab activites drop off, particularly when it?s temporary... So, in an attempt to address this, we?re instituting a change in policy. There will be a new, nominal monthly fee for bins in the lab: $5 for small bins; $10 for medium sized bins (our most popular model); and $15 for large bins or rollarounds. The charge for lockers will be $10. (This fee does not include overhead.) I should add that the willingness to pay is still no guarantee. For bins, we will still assign priority to: labmembers and research groups who cap; labmembers/research groups logging equipment activity (a few hours each month); new labmembers. For lockers, the priority will be visiting/travelling labmembers and non-Stanford labmembers. Hopefully, this will ensure that only people with active projects and spend a lot of time in the lab will have bins and lockers, and that these will cycle quickly to meet demand. The lab bin and lockers fee will be instituted, starting in the month of March 2005. We?ll be sending emails out soon to confirm locker and bin assignments and fees. This fee will appear as a stockroom charge. If you have more than one active project/account, your default account will be charged. Just a reminder: there is no charge for storage in the CAD room area. (These new fees apply only to storage bins inside the cleanroom and to the red lockers in the hallway.) We sorry to do this, but really think this will there is lab and locker storage for everyone who needs it. (Well, it seems to work with lockers at Roble Gym...) Thanks for your attention -- Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From guerra at par.stanford.edu Fri Jan 28 14:37:17 2005 From: guerra at par.stanford.edu (Ann Guerra) Date: Fri, 28 Jan 2005 14:37:17 -0800 (PST) Subject: SPECIAL SEMINAR - PHILIPS EINDHOVEN, Fri 2/4/05 Message-ID: Special Seminar of ISSCC Presentations Philips Research Labs, Eindhoven, The Netherlands FRIDAY, FEBRUARY 4, 2005 Center for Integrated Systems, Stanford University CIS-101 10:30-12:30 The following three Int'l Solid-State Circuits Conference 2005 presentations by Philips will be given on campus. The participants are eager to meet with students to discuss Philips and their research, so please stay on after the presentations. ----------------------- * * * -------------------------- 1 ===== "A 12b 500MS/s DAC with >70dB SFDR up to 120MHz in 0.18um CMOS" K. Doris, J. Briaire, D. Leenaerts, M. Vertregt, A. van Roermund Philips, Eindhoven, The Netherlands (6.4) A CMOS current steering 12b 500MS/s 216mW DAC without any additional circuitry to remove errors introduced during the conversion process has >70dB SFDR up to 120MHz above the Nyquist band. This is comparable to state-of-the-art performance requiring additional circuitry, and better than any design without additional circuitry. 2 ===== "An Interference-Robust Receive Chain for UWB Radio in SiGe BiCMOS" J. Bergervoet, K. Harish, G. van der Weide, D. Leenaerts, R. van de Beek, H.Waite, Y. Zhang, S. Aggarwal, C. Razzell, R. Roovers Philips, Eindhoven, The Netherlands (11.1) A fully integrated receive chain for UWB radio in SiGe BiCMOS is presented. The packaged device includes a wideband LNA, a mixer, and an IF filter and has an overall NF of 7.5dB. The IIP3 of -3dBm and the accurately controlled and steep filter characteristic enables a robust co-existence with systems working in the 2.4 and 5GHz bands. 3 ===== "A 4.7mW 89.5dB DR CT Complex Sigma-Delta ADC with Built-In LPF" F. Munoz, K. Philips , A. Torralba - presented by K. Philips Universidad de Sevilla, Sevilla, Spain and Philips Research (27.5) A CT complex sigma-delta ADC with built-in LPF is presented. A modified feedback topology is used to improve robustness to interferers near fs/2 or fs. Adding programmable gain control, the 0.18um CMOS ADC achieves 89.5dB DR in a 1MHz BW, consuming 4.7mW from a 1.8V supply. From rcrane at snf.stanford.edu Fri Jan 28 15:14:26 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 28 Jan 2005 15:14:26 -0800 Subject: Photo area solvent exhaust shutdown Message-ID: <41FAC752.98D1963@snf.stanford.edu> Lithography users, The solvent exhaust system servicing the litho solvent bench, ebeam bench, SVG coat tracks, SVG developer tracks, DNS track, headway spinner, laurell spinners, YES oven, and all bake ovens will be shut down for servicing on: Monday, February 7, from 0630 to 0730. The above mentioned tools will not be available for use during this time. Please plan accordingly. Thanks for your patience, Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Mon Jan 31 12:06:53 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 31 Jan 2005 12:06:53 -0800 Subject: Delay in furnace shutdown Message-ID: <41FE8FDD.DF28947A@snf.stanford.edu> Fab users, The furnace area shutdown scheduled for late February has been delayed. The scope of the project has expanded and will require additional work to be completed prior to shutting down the area. Good news: The additional work will shorten the actual downtime the area will suffer from three weeks to one week plus. The new timetable is being determined, but the shutdown will probably occur in approximately three months. More details will follow as the timing firms up. Thanks you for your patience, Dick Future furnace project details: The Thermco Bank 2 installation requires the bank 1-4 process and house gases to be turned-off and lines purge to allow repositioning of existing gas lines and adding a few new tie-ins. The existing Tylan furnace can not be moved until the gas lines are cut. Since the toxic and house gases are regulated by Santa Clara County Building and Environmental Departments, all work must be tested and inspected according to their timetable. We will complete as much preliminary work as possible prior to shutting down gases. This action will affect the following tubes: (bank1) thermco1, thermco2, thermconitride1, thermcopoly1, (bank2) tylan5 (boron), tylan6 (phosphorous), teos2, tylansige, (bank3) tylanpoly, tylannitride, tylanbpsg, tylanfga, (bank4) tystar, teos. Tylan bank 1, the tylan oxidation furnaces, will not be affected by this action. -------------- next part -------------- An HTML attachment was scrubbed... URL: From yves-alain.peter at polymtl.ca Mon Jan 31 20:02:28 2005 From: yves-alain.peter at polymtl.ca (Yves-Alain Peter) Date: Mon, 31 Jan 2005 23:02:28 -0500 Subject: very deep etching of fused silica In-Reply-To: <20050201014942.12084.qmail@server266.com> References: <20050201014942.12084.qmail@server266.com> Message-ID: <41FEFF54.4040704@polymtl.ca> Hi Ben, Try contacting Suss MicroOptics (http://www.suss-microoptics.com/) They might be able to make it. Good luck, Yves-Alain **************************************** Yves-Alain Peter Professeur Adjoint D?partement de G?nie Physique Ecole Polytechnique de Montr?al C.P. 6079, Succ. Centre-Ville Montr?al, Qu?bec H3C 3A7 CANADA T?l : + 1 514 340 4711 poste 3100 Fax : + 1 514 340 3218 yves-alain.peter at polymtl.ca http://mems.phys.polymtl.ca **************************************** ben.jian wrote: >Hi, > >We are trying to etch microlenses on fused silica wafer. The height of the microlens is very large - 100 micron tall. The diameter of the microlens is also large - 3.8mm. We think this is definitely not doable at SNF. Does anyone know where we can go to etch such a tall microlens in fused silica? Thanks. > >Ben > >