Fwd: Univ. PhD Dissertation Defense/ Marco Rolandi

Marco Rolandi marco.rolandi at gmail.com
Sun Jul 17 23:54:01 PDT 2005

Hello Labmembers,
 I will be defending tuesday at 10am in CIS-X.
I thought it might be of interest.

---------- Forwarded message ----------
From: Claire Nicholas <claireni at stanford.edu>
Date: Jul 12, 2005 10:08 AM
Subject: Re: Univ. PhD Dissertation Defense/ Marco Rolandi
Cc: apgradstudents at lists.stanford.edu, apfaculty at lists.stanford.edu, 
yoshio.nishi at stanford.edu

*Speaker: Marco Rolandi
Research Advisor: Professor Hongjie Dai*
*Title:* *Scanning Probes for Lithography, Manipulation and Devices*
Date : July 19, 2005

Time: 10:00 a.m.

Place: CIS-X Auditorium
*Future device miniaturization requires developing new lithography 
techniques capable of fabricating progressively smaller structures. Scanning 
probes are relatively low cost equipment that can push the limit of 
lithography in the nanometer range, with the advantages of high resolution, 
accuracy in the positioning of the overlayers and no proximity aberrations. 
We have developed three novel scanning probe lithography (SPL) resists based 
on thin films of Titanium, Molybdenum and Tungsten and we have manipulated 
single walled carbon nanotubes using the sharp tip of an atomic force 
microscope (AFM) for the fabrication of nanostructures.

A dendrimer-passivated Ti film was imaged in the positive and the negative 
tone using SPL. This is the first example of SPL imaging in both tones using 
a unique resist. Positive tone patterning was obtained by locally scribing 
the dendrimer molecules and subsequent acid etch of the deprotected Ti film. 
Local anodic oxidation transforms Ti into TiO--2 and deposits a thin layer 
of amorphous carbon on the patterned areas. This is very resistive to base 
etch and affords negative tone imaging of the Ti surface.

Molybdenum and Tungsten were patterned using local anodic oxidation. This 
scheme is particularly flexible thanks to the solubility in water of the 
fully oxidized states of the two metals. We will present the facile 
fabrication of several nanostructures such as of trenches, dots wires and 
nanoelectrodes and show the potential of this scheme for competing with 
conventional lithographic techniques based on radiation.


Marco Rolandi
PhD Candidate Department of Applied Physics

Dai Group
Department of Chemistry
Stanford University
Stanford, 94305
phone: (650) 725-9156
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