using the epi machine to get smooth sidewalls

Wibool Piyawattanametha wibool at
Thu Jun 2 09:07:13 PDT 2005

Hi Kevin,

Please find this paper.  The answer is there.

Ming-Chang M. Lee and Ming C. Wu, "3D Silicon Transformation using Hydrogen
Annealing," Proc. Solid State Sensor, Actuator and Microsystems Workshop
(Hilton Head 2004) Hilton Head Island, South Carolina, June 6-10, 2004.



Wibool Piyawattanametha, Ph.D.
Stanford University
Departments of Applied Physics, Biological Sciences, and Pediatrics
James H. Clark Center (Bio-X) - Room W080
318 Campus Drive
Stanford, CA 94305
Telephone: (650) 725-4097
Fax: (650) 724-5805

-----Original Message-----
From: Kevin Huang [mailto:kevhuang at] 
Sent: Thursday, June 02, 2005 8:27 AM
To: labmembers at
Subject: using the epi machine to get smooth sidewalls

      I've heard that people use the epi machine to get smooth side walls
after an STS Etch run.  Does anyone have any experience doing this and if
so, what's the recipe you used?



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