using the epi machine to get smooth sidewalls
wibool at stanford.edu
Thu Jun 2 09:07:13 PDT 2005
Please find this paper. The answer is there.
Ming-Chang M. Lee and Ming C. Wu, "3D Silicon Transformation using Hydrogen
Annealing," Proc. Solid State Sensor, Actuator and Microsystems Workshop
(Hilton Head 2004) Hilton Head Island, South Carolina, June 6-10, 2004.
Wibool Piyawattanametha, Ph.D.
Departments of Applied Physics, Biological Sciences, and Pediatrics
James H. Clark Center (Bio-X) - Room W080
318 Campus Drive
Stanford, CA 94305
Telephone: (650) 725-4097
Fax: (650) 724-5805
From: Kevin Huang [mailto:kevhuang at stanford.edu]
Sent: Thursday, June 02, 2005 8:27 AM
To: labmembers at snf.stanford.edu
Subject: using the epi machine to get smooth sidewalls
I've heard that people use the epi machine to get smooth side walls
after an STS Etch run. Does anyone have any experience doing this and if
so, what's the recipe you used?
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